JPH03274648A - ショートアーク型水銀蒸気放電灯 - Google Patents

ショートアーク型水銀蒸気放電灯

Info

Publication number
JPH03274648A
JPH03274648A JP7219890A JP7219890A JPH03274648A JP H03274648 A JPH03274648 A JP H03274648A JP 7219890 A JP7219890 A JP 7219890A JP 7219890 A JP7219890 A JP 7219890A JP H03274648 A JPH03274648 A JP H03274648A
Authority
JP
Japan
Prior art keywords
anode
arc
tip
cathode
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7219890A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587937B2 (enExample
Inventor
Hirohisa Iwabayashi
弘久 岩林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP7219890A priority Critical patent/JPH03274648A/ja
Publication of JPH03274648A publication Critical patent/JPH03274648A/ja
Publication of JPH0587937B2 publication Critical patent/JPH0587937B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamp (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7219890A 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯 Granted JPH03274648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7219890A JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7219890A JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Publications (2)

Publication Number Publication Date
JPH03274648A true JPH03274648A (ja) 1991-12-05
JPH0587937B2 JPH0587937B2 (enExample) 1993-12-20

Family

ID=13482295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7219890A Granted JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Country Status (1)

Country Link
JP (1) JPH03274648A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100389999B1 (ko) * 1995-06-26 2003-10-04 우시오덴키 가부시키가이샤 쇼트아크형수은램프및그점등방법
JP2007201410A (ja) * 2005-12-27 2007-08-09 Harison Toshiba Lighting Corp 紫外線照射装置
JP2011034824A (ja) * 2009-08-03 2011-02-17 Ushio Inc ショートアーク型放電ランプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49119481A (enExample) * 1973-03-16 1974-11-14
JPS6059733A (ja) * 1983-09-13 1985-04-06 Ushio Inc 半導体露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49119481A (enExample) * 1973-03-16 1974-11-14
JPS6059733A (ja) * 1983-09-13 1985-04-06 Ushio Inc 半導体露光装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100389999B1 (ko) * 1995-06-26 2003-10-04 우시오덴키 가부시키가이샤 쇼트아크형수은램프및그점등방법
JP2007201410A (ja) * 2005-12-27 2007-08-09 Harison Toshiba Lighting Corp 紫外線照射装置
JP2011034824A (ja) * 2009-08-03 2011-02-17 Ushio Inc ショートアーク型放電ランプ

Also Published As

Publication number Publication date
JPH0587937B2 (enExample) 1993-12-20

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