JPH0326326Y2 - - Google Patents

Info

Publication number
JPH0326326Y2
JPH0326326Y2 JP18083885U JP18083885U JPH0326326Y2 JP H0326326 Y2 JPH0326326 Y2 JP H0326326Y2 JP 18083885 U JP18083885 U JP 18083885U JP 18083885 U JP18083885 U JP 18083885U JP H0326326 Y2 JPH0326326 Y2 JP H0326326Y2
Authority
JP
Japan
Prior art keywords
diaphragm
chamber
pressure
valve
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18083885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6289505U (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18083885U priority Critical patent/JPH0326326Y2/ja
Publication of JPS6289505U publication Critical patent/JPS6289505U/ja
Application granted granted Critical
Publication of JPH0326326Y2 publication Critical patent/JPH0326326Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP18083885U 1985-11-26 1985-11-26 Expired JPH0326326Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083885U JPH0326326Y2 (fi) 1985-11-26 1985-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083885U JPH0326326Y2 (fi) 1985-11-26 1985-11-26

Publications (2)

Publication Number Publication Date
JPS6289505U JPS6289505U (fi) 1987-06-08
JPH0326326Y2 true JPH0326326Y2 (fi) 1991-06-07

Family

ID=31125161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083885U Expired JPH0326326Y2 (fi) 1985-11-26 1985-11-26

Country Status (1)

Country Link
JP (1) JPH0326326Y2 (fi)

Also Published As

Publication number Publication date
JPS6289505U (fi) 1987-06-08

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