JPS6289505U - - Google Patents
Info
- Publication number
- JPS6289505U JPS6289505U JP18083885U JP18083885U JPS6289505U JP S6289505 U JPS6289505 U JP S6289505U JP 18083885 U JP18083885 U JP 18083885U JP 18083885 U JP18083885 U JP 18083885U JP S6289505 U JPS6289505 U JP S6289505U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- chamber
- separated
- case
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005452 bending Methods 0.000 description 1
Landscapes
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18083885U JPH0326326Y2 (fi) | 1985-11-26 | 1985-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18083885U JPH0326326Y2 (fi) | 1985-11-26 | 1985-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6289505U true JPS6289505U (fi) | 1987-06-08 |
| JPH0326326Y2 JPH0326326Y2 (fi) | 1991-06-07 |
Family
ID=31125161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18083885U Expired JPH0326326Y2 (fi) | 1985-11-26 | 1985-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326326Y2 (fi) |
-
1985
- 1985-11-26 JP JP18083885U patent/JPH0326326Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0326326Y2 (fi) | 1991-06-07 |