JPH0325400Y2 - - Google Patents

Info

Publication number
JPH0325400Y2
JPH0325400Y2 JP1986100176U JP10017686U JPH0325400Y2 JP H0325400 Y2 JPH0325400 Y2 JP H0325400Y2 JP 1986100176 U JP1986100176 U JP 1986100176U JP 10017686 U JP10017686 U JP 10017686U JP H0325400 Y2 JPH0325400 Y2 JP H0325400Y2
Authority
JP
Japan
Prior art keywords
substrate
holder
support
cap
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986100176U
Other languages
English (en)
Japanese (ja)
Other versions
JPS636728U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986100176U priority Critical patent/JPH0325400Y2/ja
Publication of JPS636728U publication Critical patent/JPS636728U/ja
Application granted granted Critical
Publication of JPH0325400Y2 publication Critical patent/JPH0325400Y2/ja
Expired legal-status Critical Current

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  • Weting (AREA)
JP1986100176U 1986-06-30 1986-06-30 Expired JPH0325400Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986100176U JPH0325400Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986100176U JPH0325400Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Publications (2)

Publication Number Publication Date
JPS636728U JPS636728U (enrdf_load_stackoverflow) 1988-01-18
JPH0325400Y2 true JPH0325400Y2 (enrdf_load_stackoverflow) 1991-06-03

Family

ID=30969748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986100176U Expired JPH0325400Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Country Status (1)

Country Link
JP (1) JPH0325400Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007052300A (ja) * 2005-08-19 2007-03-01 Pre-Tech Co Ltd マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法
JP4885755B2 (ja) * 2007-02-07 2012-02-29 ラピスセミコンダクタ株式会社 ガイド部材の位置決め方法、及び基板の位置決め方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137177U (enrdf_load_stackoverflow) * 1975-04-26 1976-11-05
JPS5649703Y2 (enrdf_load_stackoverflow) * 1977-09-21 1981-11-19
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
JPS5571547U (enrdf_load_stackoverflow) * 1978-11-08 1980-05-16
JPS614772U (ja) * 1984-06-12 1986-01-13 ホ−ヤ株式会社 スプレ−装置

Also Published As

Publication number Publication date
JPS636728U (enrdf_load_stackoverflow) 1988-01-18

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