JPH0220823Y2 - - Google Patents
Info
- Publication number
- JPH0220823Y2 JPH0220823Y2 JP1031486U JP1031486U JPH0220823Y2 JP H0220823 Y2 JPH0220823 Y2 JP H0220823Y2 JP 1031486 U JP1031486 U JP 1031486U JP 1031486 U JP1031486 U JP 1031486U JP H0220823 Y2 JPH0220823 Y2 JP H0220823Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support
- holder
- support rod
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 66
- 239000007788 liquid Substances 0.000 claims description 25
- 239000007921 spray Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 description 8
- 238000011161 development Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1031486U JPH0220823Y2 (enrdf_load_stackoverflow) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1031486U JPH0220823Y2 (enrdf_load_stackoverflow) | 1986-01-29 | 1986-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124844U JPS62124844U (enrdf_load_stackoverflow) | 1987-08-08 |
| JPH0220823Y2 true JPH0220823Y2 (enrdf_load_stackoverflow) | 1990-06-06 |
Family
ID=30796490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1031486U Expired JPH0220823Y2 (enrdf_load_stackoverflow) | 1986-01-29 | 1986-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220823Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-01-29 JP JP1031486U patent/JPH0220823Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62124844U (enrdf_load_stackoverflow) | 1987-08-08 |
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