JPH0323511B2 - - Google Patents
Info
- Publication number
- JPH0323511B2 JPH0323511B2 JP12902385A JP12902385A JPH0323511B2 JP H0323511 B2 JPH0323511 B2 JP H0323511B2 JP 12902385 A JP12902385 A JP 12902385A JP 12902385 A JP12902385 A JP 12902385A JP H0323511 B2 JPH0323511 B2 JP H0323511B2
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- aln
- base material
- aluminum nitride
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 39
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 22
- 238000004381 surface treatment Methods 0.000 claims description 21
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 16
- 238000005245 sintering Methods 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 239000012298 atmosphere Substances 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 150000001247 metal acetylides Chemical class 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 24
- 239000002335 surface treatment layer Substances 0.000 description 12
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 229910000833 kovar Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12902385A JPS61286287A (ja) | 1985-06-13 | 1985-06-13 | 窒化アルミニウム製基材の表面処理方法 |
| US06/869,792 US4695517A (en) | 1985-05-31 | 1986-06-02 | Composite layer aluminum nitride base sintered body |
| US07/050,388 US4800137A (en) | 1985-05-13 | 1987-05-18 | Composite layer aluminum nitride base sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12902385A JPS61286287A (ja) | 1985-06-13 | 1985-06-13 | 窒化アルミニウム製基材の表面処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61286287A JPS61286287A (ja) | 1986-12-16 |
| JPH0323511B2 true JPH0323511B2 (enrdf_load_stackoverflow) | 1991-03-29 |
Family
ID=14999235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12902385A Granted JPS61286287A (ja) | 1985-05-13 | 1985-06-13 | 窒化アルミニウム製基材の表面処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61286287A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0679994B2 (ja) * | 1985-12-17 | 1994-10-12 | 住友電気工業株式会社 | 金属化面を有する窒化アルミニウム焼結体 |
| JPS63195183A (ja) * | 1987-02-06 | 1988-08-12 | 住友電気工業株式会社 | メタライズ面を有するＡｌＮ焼結体の製造方法 |
-
1985
- 1985-06-13 JP JP12902385A patent/JPS61286287A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61286287A (ja) | 1986-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4961987A (en) | Aluminum nitride sintered body with high thermal conductivity and process for producing same | |
| EP0100232B2 (en) | Substrate for semiconductor apparatus | |
| JPH0569797B2 (enrdf_load_stackoverflow) | ||
| US4571610A (en) | Semiconductor device having electrically insulating substrate of SiC | |
| US4695517A (en) | Composite layer aluminum nitride base sintered body | |
| JPH0243700B2 (enrdf_load_stackoverflow) | ||
| JPS61281089A (ja) | 窒化アルミニウム製基材の表面構造 | |
| JPH0323512B2 (enrdf_load_stackoverflow) | ||
| JPH0323511B2 (enrdf_load_stackoverflow) | ||
| JPH0313190B2 (enrdf_load_stackoverflow) | ||
| JPH05238857A (ja) | 窒化アルミニウム基板のメタライズ方法 | |
| JPH04949B2 (enrdf_load_stackoverflow) | ||
| JPH05156303A (ja) | メタライズ用金属粉末組成物，それを用いたメタライズ基板及びメタライズ基板の製造方法 | |
| JPH06166573A (ja) | 高熱伝導性窒化アルミニウム焼結体 | |
| JPS5891059A (ja) | 複合セラミツクス焼結体及びその製造方法 | |
| JPS61295275A (ja) | 高熱伝導性窒化アルミニウム焼結体 | |
| JP2784540B2 (ja) | メタライズ用組成物 | |
| JPH03146487A (ja) | 金属化層を有する窒化アルミニウム焼結体の製造方法 | |
| JPH078750B2 (ja) | 窒化アルミニウム製基材の表面構造 | |
| JPH03146488A (ja) | 金属化層を有する窒化アルミニウム焼結体の製造方法 | |
| JP2867693B2 (ja) | 回路基板 | |
| JPH0283262A (ja) | 金属化層を有する窒化アルミニウム焼結体の製造方法 | |
| JPS63103885A (ja) | 炭化ケイ素焼結体の金属化組成物 | |
| JPS6386598A (ja) | 高熱伝導性回路基板の製法 | |
| JPH01298072A (ja) | 窒化アルミニウム予備焼結体、窒化アルミニウム焼結体およびそれらの製造方法 |