JPH0322015B2 - - Google Patents

Info

Publication number
JPH0322015B2
JPH0322015B2 JP59178869A JP17886984A JPH0322015B2 JP H0322015 B2 JPH0322015 B2 JP H0322015B2 JP 59178869 A JP59178869 A JP 59178869A JP 17886984 A JP17886984 A JP 17886984A JP H0322015 B2 JPH0322015 B2 JP H0322015B2
Authority
JP
Japan
Prior art keywords
icp
contact
nozzle
mass spectrometer
inductively coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59178869A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155848A (ja
Inventor
Kenichi Sakata
Hirotoshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP59178869A priority Critical patent/JPS6155848A/ja
Publication of JPS6155848A publication Critical patent/JPS6155848A/ja
Publication of JPH0322015B2 publication Critical patent/JPH0322015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP59178869A 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置 Granted JPS6155848A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59178869A JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59178869A JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Publications (2)

Publication Number Publication Date
JPS6155848A JPS6155848A (ja) 1986-03-20
JPH0322015B2 true JPH0322015B2 (enExample) 1991-03-26

Family

ID=16056107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59178869A Granted JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Country Status (1)

Country Link
JP (1) JPS6155848A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489256A (en) * 1987-09-30 1989-04-03 Yokogawa Electric Corp High-frequency inductive coupling plasma mass spectrometer
GB8901975D0 (en) * 1989-01-30 1989-03-22 Vg Instr Group Plasma mass spectrometer
JP2591822B2 (ja) * 1989-05-26 1997-03-19 日本電子株式会社 高周波誘導結合プラズマ質量分析装置
CN105355534B (zh) * 2015-11-23 2017-01-25 中国科学院地质与地球物理研究所 一种实现电感耦合等离子体离子源工作在惰性气体环境的方法及装置

Also Published As

Publication number Publication date
JPS6155848A (ja) 1986-03-20

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term