JPS6155848A - 誘導結合プラズマをイオン源とした質量分析装置 - Google Patents

誘導結合プラズマをイオン源とした質量分析装置

Info

Publication number
JPS6155848A
JPS6155848A JP59178869A JP17886984A JPS6155848A JP S6155848 A JPS6155848 A JP S6155848A JP 59178869 A JP59178869 A JP 59178869A JP 17886984 A JP17886984 A JP 17886984A JP S6155848 A JPS6155848 A JP S6155848A
Authority
JP
Japan
Prior art keywords
contact
nozzle
icp
ion source
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59178869A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322015B2 (enExample
Inventor
Kenichi Sakata
健一 阪田
Hirotoshi Ishikawa
石川　宏俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP59178869A priority Critical patent/JPS6155848A/ja
Publication of JPS6155848A publication Critical patent/JPS6155848A/ja
Publication of JPH0322015B2 publication Critical patent/JPH0322015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP59178869A 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置 Granted JPS6155848A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59178869A JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59178869A JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Publications (2)

Publication Number Publication Date
JPS6155848A true JPS6155848A (ja) 1986-03-20
JPH0322015B2 JPH0322015B2 (enExample) 1991-03-26

Family

ID=16056107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59178869A Granted JPS6155848A (ja) 1984-08-28 1984-08-28 誘導結合プラズマをイオン源とした質量分析装置

Country Status (1)

Country Link
JP (1) JPS6155848A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489256A (en) * 1987-09-30 1989-04-03 Yokogawa Electric Corp High-frequency inductive coupling plasma mass spectrometer
JPH02312154A (ja) * 1989-05-26 1990-12-27 Jeol Ltd 高周波誘導結合プラズマ質量分析装置
JPH05500286A (ja) * 1989-01-30 1993-01-21 フィソンズ・パブリック・リミテッド・カンパニー プラズマ質量分析計
CN105355534A (zh) * 2015-11-23 2016-02-24 中国科学院地质与地球物理研究所 一种实现电感耦合等离子体离子源工作在惰性气体环境的方法及装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489256A (en) * 1987-09-30 1989-04-03 Yokogawa Electric Corp High-frequency inductive coupling plasma mass spectrometer
JPH05500286A (ja) * 1989-01-30 1993-01-21 フィソンズ・パブリック・リミテッド・カンパニー プラズマ質量分析計
JPH02312154A (ja) * 1989-05-26 1990-12-27 Jeol Ltd 高周波誘導結合プラズマ質量分析装置
CN105355534A (zh) * 2015-11-23 2016-02-24 中国科学院地质与地球物理研究所 一种实现电感耦合等离子体离子源工作在惰性气体环境的方法及装置

Also Published As

Publication number Publication date
JPH0322015B2 (enExample) 1991-03-26

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