JPH0321511B2 - - Google Patents
Info
- Publication number
- JPH0321511B2 JPH0321511B2 JP60121560A JP12156085A JPH0321511B2 JP H0321511 B2 JPH0321511 B2 JP H0321511B2 JP 60121560 A JP60121560 A JP 60121560A JP 12156085 A JP12156085 A JP 12156085A JP H0321511 B2 JPH0321511 B2 JP H0321511B2
- Authority
- JP
- Japan
- Prior art keywords
- ampoule
- crystal
- outer tube
- tube
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 68
- 239000003708 ampul Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 21
- 230000008014 freezing Effects 0.000 claims description 9
- 238000007710 freezing Methods 0.000 claims description 9
- 230000001737 promoting effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 7
- 238000002425 crystallisation Methods 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156085A JPS61281095A (ja) | 1985-06-06 | 1985-06-06 | 結晶成長用アンプル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156085A JPS61281095A (ja) | 1985-06-06 | 1985-06-06 | 結晶成長用アンプル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61281095A JPS61281095A (ja) | 1986-12-11 |
| JPH0321511B2 true JPH0321511B2 (fr) | 1991-03-22 |
Family
ID=14814258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12156085A Granted JPS61281095A (ja) | 1985-06-06 | 1985-06-06 | 結晶成長用アンプル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61281095A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6321278A (ja) * | 1986-07-11 | 1988-01-28 | Nippon Mining Co Ltd | 単結晶成長用アンプル |
| US5312506A (en) * | 1987-06-15 | 1994-05-17 | Mitsui Mining Company, Limited | Method for growing single crystals from melt |
| JP2656038B2 (ja) * | 1987-06-15 | 1997-09-24 | 三井鉱山株式会社 | 融液からの単結晶育成方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58135195A (ja) * | 1982-02-04 | 1983-08-11 | Fujitsu Ltd | 半導体結晶成長用アンプル |
| JPS607596B2 (ja) * | 1981-05-14 | 1985-02-26 | 株式会社神戸製鋼所 | 被覆ア−ク溶接棒の塗装押出装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119445U (fr) * | 1973-02-13 | 1974-10-12 | ||
| JPS607596U (ja) * | 1983-06-24 | 1985-01-19 | ミツミ電機株式会社 | 単結晶育成用ルツボ |
-
1985
- 1985-06-06 JP JP12156085A patent/JPS61281095A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607596B2 (ja) * | 1981-05-14 | 1985-02-26 | 株式会社神戸製鋼所 | 被覆ア−ク溶接棒の塗装押出装置 |
| JPS58135195A (ja) * | 1982-02-04 | 1983-08-11 | Fujitsu Ltd | 半導体結晶成長用アンプル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61281095A (ja) | 1986-12-11 |
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