JPH0320905B2 - - Google Patents
Info
- Publication number
- JPH0320905B2 JPH0320905B2 JP55187295A JP18729580A JPH0320905B2 JP H0320905 B2 JPH0320905 B2 JP H0320905B2 JP 55187295 A JP55187295 A JP 55187295A JP 18729580 A JP18729580 A JP 18729580A JP H0320905 B2 JPH0320905 B2 JP H0320905B2
- Authority
- JP
- Japan
- Prior art keywords
- charge storage
- electrode
- capacitive element
- transistor
- storage electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000003990 capacitor Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55187295A JPS57112066A (en) | 1980-12-29 | 1980-12-29 | Laminated capacitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55187295A JPS57112066A (en) | 1980-12-29 | 1980-12-29 | Laminated capacitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57112066A JPS57112066A (en) | 1982-07-12 |
JPH0320905B2 true JPH0320905B2 (zh) | 1991-03-20 |
Family
ID=16203491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55187295A Granted JPS57112066A (en) | 1980-12-29 | 1980-12-29 | Laminated capacitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57112066A (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956754A (ja) * | 1982-09-24 | 1984-04-02 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS5961956A (ja) * | 1982-09-30 | 1984-04-09 | Fujitsu Ltd | ダイナミツク・メモリ |
JPS59188963A (ja) * | 1983-04-12 | 1984-10-26 | Nec Corp | 半導体装置 |
JPS59231851A (ja) * | 1983-06-14 | 1984-12-26 | Nippon Telegr & Teleph Corp <Ntt> | 半導体メモリセル |
JPS6014462A (ja) * | 1983-07-05 | 1985-01-25 | Oki Electric Ind Co Ltd | 半導体メモリ素子 |
JPH0682681B2 (ja) * | 1984-11-28 | 1994-10-19 | 株式会社日立製作所 | 半導体装置およびその製造方法 |
JPH0682783B2 (ja) * | 1985-03-29 | 1994-10-19 | 三菱電機株式会社 | 容量およびその製造方法 |
US4685197A (en) * | 1986-01-07 | 1987-08-11 | Texas Instruments Incorporated | Fabricating a stacked capacitor |
JPS63133565A (ja) * | 1986-11-25 | 1988-06-06 | Matsushita Electronics Corp | 半導体記憶装置 |
JP2685833B2 (ja) * | 1988-09-30 | 1997-12-03 | 株式会社東芝 | 半導体記憶装置およびその製造方法 |
JPH0810750B2 (ja) * | 1988-11-16 | 1996-01-31 | 三菱電機株式会社 | 半導体装置 |
US5057446A (en) * | 1990-08-06 | 1991-10-15 | Texas Instruments Incorporated | Method of making an EEPROM with improved capacitive coupling between control gate and floating gate |
JP2797746B2 (ja) * | 1991-04-05 | 1998-09-17 | 日本電気株式会社 | 集積回路用容量素子の製作方法 |
US6617205B1 (en) | 1995-11-20 | 2003-09-09 | Hitachi, Ltd. | Semiconductor storage device and process for manufacturing the same |
US6689668B1 (en) | 2000-08-31 | 2004-02-10 | Samsung Austin Semiconductor, L.P. | Methods to improve density and uniformity of hemispherical grain silicon layers |
US6403455B1 (en) | 2000-08-31 | 2002-06-11 | Samsung Austin Semiconductor, L.P. | Methods of fabricating a memory device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123687A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Binary memory element |
JPS55154762A (en) * | 1979-05-22 | 1980-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor memory |
-
1980
- 1980-12-29 JP JP55187295A patent/JPS57112066A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123687A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Binary memory element |
JPS55154762A (en) * | 1979-05-22 | 1980-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor memory |
Also Published As
Publication number | Publication date |
---|---|
JPS57112066A (en) | 1982-07-12 |
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