Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac IncfiledCriticalUlvac Inc
Priority to JP8578683ApriorityCriticalpatent/JPS59213033A/ja
Priority to DE8484301530Tprioritypatent/DE3465647D1/de
Priority to EP84301530Aprioritypatent/EP0122030B1/en
Publication of JPS59213033ApublicationCriticalpatent/JPS59213033A/ja
Priority to US07/412,535prioritypatent/US5024854A/en
Publication of JPH0320815B2publicationCriticalpatent/JPH0320815B2/ja