JPH0319232Y2 - - Google Patents
Info
- Publication number
- JPH0319232Y2 JPH0319232Y2 JP1984145399U JP14539984U JPH0319232Y2 JP H0319232 Y2 JPH0319232 Y2 JP H0319232Y2 JP 1984145399 U JP1984145399 U JP 1984145399U JP 14539984 U JP14539984 U JP 14539984U JP H0319232 Y2 JPH0319232 Y2 JP H0319232Y2
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- gauge resistors
- temperature
- resistors
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984145399U JPH0319232Y2 (US06174465-20010116-C00003.png) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984145399U JPH0319232Y2 (US06174465-20010116-C00003.png) | 1984-09-26 | 1984-09-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161848U JPS6161848U (US06174465-20010116-C00003.png) | 1986-04-25 |
| JPH0319232Y2 true JPH0319232Y2 (US06174465-20010116-C00003.png) | 1991-04-23 |
Family
ID=30703653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984145399U Expired JPH0319232Y2 (US06174465-20010116-C00003.png) | 1984-09-26 | 1984-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0319232Y2 (US06174465-20010116-C00003.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010032389A (ja) * | 2008-07-29 | 2010-02-12 | Dainippon Printing Co Ltd | 物理量センサ及びその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5468170A (en) * | 1977-11-11 | 1979-06-01 | Hitachi Ltd | Fine pattern element |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4994573U (US06174465-20010116-C00003.png) * | 1972-12-08 | 1974-08-15 |
-
1984
- 1984-09-26 JP JP1984145399U patent/JPH0319232Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5468170A (en) * | 1977-11-11 | 1979-06-01 | Hitachi Ltd | Fine pattern element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161848U (US06174465-20010116-C00003.png) | 1986-04-25 |
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