JPH0318435Y2 - - Google Patents
Info
- Publication number
- JPH0318435Y2 JPH0318435Y2 JP1985138465U JP13846585U JPH0318435Y2 JP H0318435 Y2 JPH0318435 Y2 JP H0318435Y2 JP 1985138465 U JP1985138465 U JP 1985138465U JP 13846585 U JP13846585 U JP 13846585U JP H0318435 Y2 JPH0318435 Y2 JP H0318435Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- gripper
- holding
- plate
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 36
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985138465U JPH0318435Y2 (US06346242-20020212-C00066.png) | 1985-09-10 | 1985-09-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985138465U JPH0318435Y2 (US06346242-20020212-C00066.png) | 1985-09-10 | 1985-09-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6247542U JPS6247542U (US06346242-20020212-C00066.png) | 1987-03-24 |
JPH0318435Y2 true JPH0318435Y2 (US06346242-20020212-C00066.png) | 1991-04-18 |
Family
ID=31043472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985138465U Expired JPH0318435Y2 (US06346242-20020212-C00066.png) | 1985-09-10 | 1985-09-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0318435Y2 (US06346242-20020212-C00066.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003024673A1 (fr) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0666375B2 (ja) * | 1987-03-30 | 1994-08-24 | 株式会社日立製作所 | ウエハ搬送方法 |
JP4600193B2 (ja) * | 2005-07-20 | 2010-12-15 | 株式会社安川電機 | リング搬送システム |
JP5549655B2 (ja) * | 2011-09-26 | 2014-07-16 | 株式会社安川電機 | ハンドおよびロボット |
JP7059472B1 (ja) * | 2020-12-09 | 2022-04-26 | 田中精密工業株式会社 | 積層鉄心の加熱装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4938345A (US06346242-20020212-C00066.png) * | 1972-08-25 | 1974-04-10 | ||
JPS59201782A (ja) * | 1983-04-23 | 1984-11-15 | 大日本スクリ−ン製造株式会社 | ウエハ等の薄板物搬送装置 |
JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6079742U (ja) * | 1983-11-09 | 1985-06-03 | 日立電子エンジニアリング株式会社 | 角マスクチヤツク機構 |
JPS61142450U (US06346242-20020212-C00066.png) * | 1985-02-25 | 1986-09-03 | ||
JPS61199049U (US06346242-20020212-C00066.png) * | 1985-06-04 | 1986-12-12 |
-
1985
- 1985-09-10 JP JP1985138465U patent/JPH0318435Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4938345A (US06346242-20020212-C00066.png) * | 1972-08-25 | 1974-04-10 | ||
JPS59201782A (ja) * | 1983-04-23 | 1984-11-15 | 大日本スクリ−ン製造株式会社 | ウエハ等の薄板物搬送装置 |
JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003024673A1 (fr) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides |
Also Published As
Publication number | Publication date |
---|---|
JPS6247542U (US06346242-20020212-C00066.png) | 1987-03-24 |
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