JPH0317106B2 - - Google Patents
Info
- Publication number
- JPH0317106B2 JPH0317106B2 JP57087164A JP8716482A JPH0317106B2 JP H0317106 B2 JPH0317106 B2 JP H0317106B2 JP 57087164 A JP57087164 A JP 57087164A JP 8716482 A JP8716482 A JP 8716482A JP H0317106 B2 JPH0317106 B2 JP H0317106B2
- Authority
- JP
- Japan
- Prior art keywords
- capacitance
- signal line
- board
- probe
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 24
- 238000009413 insulation Methods 0.000 claims description 22
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087164A JPS58204374A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087164A JPS58204374A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58204374A JPS58204374A (ja) | 1983-11-29 |
| JPH0317106B2 true JPH0317106B2 (cg-RX-API-DMAC7.html) | 1991-03-07 |
Family
ID=13907343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57087164A Granted JPS58204374A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58204374A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001330579A (ja) * | 2000-05-23 | 2001-11-30 | Nec Ibaraki Ltd | パターン検査方法及びパターン検査装置及び記録媒体 |
-
1982
- 1982-05-22 JP JP57087164A patent/JPS58204374A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58204374A (ja) | 1983-11-29 |
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