JPH031602B2 - - Google Patents
Info
- Publication number
- JPH031602B2 JPH031602B2 JP16415384A JP16415384A JPH031602B2 JP H031602 B2 JPH031602 B2 JP H031602B2 JP 16415384 A JP16415384 A JP 16415384A JP 16415384 A JP16415384 A JP 16415384A JP H031602 B2 JPH031602 B2 JP H031602B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- period
- irregularities
- feed
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000737 periodic effect Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 230000004397 blinking Effects 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16415384A JPS6141907A (ja) | 1984-08-03 | 1984-08-03 | 工作物表面形状測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16415384A JPS6141907A (ja) | 1984-08-03 | 1984-08-03 | 工作物表面形状測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6141907A JPS6141907A (ja) | 1986-02-28 |
| JPH031602B2 true JPH031602B2 (enExample) | 1991-01-11 |
Family
ID=15787743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16415384A Granted JPS6141907A (ja) | 1984-08-03 | 1984-08-03 | 工作物表面形状測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141907A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI464385B (zh) * | 2012-03-22 | 2014-12-11 | Hiti Digital Inc | 用來偵測透光光柵結構之偵測裝置與偵測方法 |
| US20140261170A1 (en) * | 2013-03-15 | 2014-09-18 | Hiti Digital, Inc. | Methods for detecting an edge of a transparent material and detecting devices and systems for same |
-
1984
- 1984-08-03 JP JP16415384A patent/JPS6141907A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6141907A (ja) | 1986-02-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |