JPH0315735B2 - - Google Patents
Info
- Publication number
- JPH0315735B2 JPH0315735B2 JP9371682A JP9371682A JPH0315735B2 JP H0315735 B2 JPH0315735 B2 JP H0315735B2 JP 9371682 A JP9371682 A JP 9371682A JP 9371682 A JP9371682 A JP 9371682A JP H0315735 B2 JPH0315735 B2 JP H0315735B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- container
- waste liquid
- exhaust
- bowl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 54
- 239000007788 liquid Substances 0.000 claims description 41
- 238000004381 surface treatment Methods 0.000 claims description 9
- 239000002699 waste material Substances 0.000 description 30
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9371682A JPS58209744A (ja) | 1982-05-31 | 1982-05-31 | 回転式表面処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9371682A JPS58209744A (ja) | 1982-05-31 | 1982-05-31 | 回転式表面処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58209744A JPS58209744A (ja) | 1983-12-06 |
JPH0315735B2 true JPH0315735B2 (it) | 1991-03-01 |
Family
ID=14090134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9371682A Granted JPS58209744A (ja) | 1982-05-31 | 1982-05-31 | 回転式表面処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58209744A (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6377569A (ja) * | 1986-09-19 | 1988-04-07 | Dainippon Screen Mfg Co Ltd | 基板の回転式表面処理装置 |
JPS63136523A (ja) * | 1986-11-27 | 1988-06-08 | Nec Yamagata Ltd | 半導体製造装置 |
-
1982
- 1982-05-31 JP JP9371682A patent/JPS58209744A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58209744A (ja) | 1983-12-06 |
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