JPH0314579B2 - - Google Patents

Info

Publication number
JPH0314579B2
JPH0314579B2 JP18681586A JP18681586A JPH0314579B2 JP H0314579 B2 JPH0314579 B2 JP H0314579B2 JP 18681586 A JP18681586 A JP 18681586A JP 18681586 A JP18681586 A JP 18681586A JP H0314579 B2 JPH0314579 B2 JP H0314579B2
Authority
JP
Japan
Prior art keywords
substrate
processing machine
supply device
guide
receiving plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18681586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347037A (ja
Inventor
Tamio Ootani
Kunio Saito
Yasuhiko Kanetani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP18681586A priority Critical patent/JPS6347037A/ja
Priority to CH3038/87A priority patent/CH674817A5/fr
Priority to US07/083,279 priority patent/US4867297A/en
Priority to DE19873726726 priority patent/DE3726726A1/de
Publication of JPS6347037A publication Critical patent/JPS6347037A/ja
Publication of JPH0314579B2 publication Critical patent/JPH0314579B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP18681586A 1986-08-11 1986-08-11 基板加工機における基板交換装置 Granted JPS6347037A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP18681586A JPS6347037A (ja) 1986-08-11 1986-08-11 基板加工機における基板交換装置
CH3038/87A CH674817A5 (cs) 1986-08-11 1987-08-07
US07/083,279 US4867297A (en) 1986-08-11 1987-08-10 Board exchanging apparatus
DE19873726726 DE3726726A1 (de) 1986-08-11 1987-08-11 Leiterplatten-wechselvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18681586A JPS6347037A (ja) 1986-08-11 1986-08-11 基板加工機における基板交換装置

Publications (2)

Publication Number Publication Date
JPS6347037A JPS6347037A (ja) 1988-02-27
JPH0314579B2 true JPH0314579B2 (cs) 1991-02-27

Family

ID=16195078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18681586A Granted JPS6347037A (ja) 1986-08-11 1986-08-11 基板加工機における基板交換装置

Country Status (1)

Country Link
JP (1) JPS6347037A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2828488B2 (ja) * 1990-05-23 1998-11-25 日立精工株式会社 プリント基板加工装置

Also Published As

Publication number Publication date
JPS6347037A (ja) 1988-02-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees