JPH031377B2 - - Google Patents
Info
- Publication number
- JPH031377B2 JPH031377B2 JP18582785A JP18582785A JPH031377B2 JP H031377 B2 JPH031377 B2 JP H031377B2 JP 18582785 A JP18582785 A JP 18582785A JP 18582785 A JP18582785 A JP 18582785A JP H031377 B2 JPH031377 B2 JP H031377B2
- Authority
- JP
- Japan
- Prior art keywords
- cubic boron
- film
- reaction gas
- gas introduction
- bias voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 24
- 229910052582 BN Inorganic materials 0.000 claims description 16
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 16
- 239000012495 reaction gas Substances 0.000 claims description 14
- 238000007740 vapor deposition Methods 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- QDMRQDKMCNPQQH-UHFFFAOYSA-N boranylidynetitanium Chemical compound [B].[Ti] QDMRQDKMCNPQQH-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000001659 ion-beam spectroscopy Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- YWCYJWYNSHTONE-UHFFFAOYSA-O oxido(oxonio)boron Chemical compound [OH2+][B][O-] YWCYJWYNSHTONE-UHFFFAOYSA-O 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18582785A JPS6247472A (ja) | 1985-08-26 | 1985-08-26 | 立方晶チツ化ホウ素膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18582785A JPS6247472A (ja) | 1985-08-26 | 1985-08-26 | 立方晶チツ化ホウ素膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247472A JPS6247472A (ja) | 1987-03-02 |
| JPH031377B2 true JPH031377B2 (fr) | 1991-01-10 |
Family
ID=16177565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18582785A Granted JPS6247472A (ja) | 1985-08-26 | 1985-08-26 | 立方晶チツ化ホウ素膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247472A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5277939A (en) * | 1987-02-10 | 1994-01-11 | Semiconductor Energy Laboratory Co., Ltd. | ECR CVD method for forming BN films |
| JPS63274762A (ja) * | 1987-05-01 | 1988-11-11 | Ulvac Corp | 反応蒸着膜の形成装置 |
| US4824544A (en) * | 1987-10-29 | 1989-04-25 | International Business Machines Corporation | Large area cathode lift-off sputter deposition device |
| DE59007568D1 (de) * | 1990-04-06 | 1994-12-01 | Siemens Ag | Verfahren zur Herstellung von mikrokristallin kubischen Bornitridschichten. |
-
1985
- 1985-08-26 JP JP18582785A patent/JPS6247472A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6247472A (ja) | 1987-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5096740A (en) | Production of cubic boron nitride films by laser deposition | |
| JPH02285072A (ja) | 加工物表面のコーティング方法及びその加工物 | |
| JPH0791654B2 (ja) | 薄膜形成方法 | |
| JPS5941510B2 (ja) | 酸化ベリリウム膜とその形成方法 | |
| AU2002332200B2 (en) | Method for carrying out homogeneous and heterogeneous chemical reactions using plasma | |
| JPH031377B2 (fr) | ||
| JPH0568541B2 (fr) | ||
| JPH0420984B2 (fr) | ||
| JPH03122266A (ja) | 窒化物薄膜の製造方法 | |
| JPS6395200A (ja) | 硬質窒化ホウ素膜の製造方法 | |
| JPH0420985B2 (fr) | ||
| EP0280198B1 (fr) | Procédé de fabrication d'une couche de diamant | |
| JP2617539B2 (ja) | 立方晶窒化ほう素膜の製造装置 | |
| JPH0417669A (ja) | プラズマを用いた成膜方法およびｒｆイオンプレーティング装置 | |
| JPS63277767A (ja) | 高圧相窒化ホウ素の気相合成法 | |
| JP2680574B2 (ja) | 立方晶窒化ホウ素膜の製造方法 | |
| JP2504426B2 (ja) | ｃＢＮ薄膜の形成方法及び形成装置 | |
| JPH05147908A (ja) | 立方晶窒化ホウ素粉末の製造方法 | |
| JPH04318162A (ja) | 立方晶窒化硼素被膜の形成方法および形成装置 | |
| JPH01246357A (ja) | 立方晶窒化ホウ素膜の製造方法 | |
| JPH0733580B2 (ja) | 立方晶系窒化ホウ素膜の製造方法 | |
| JPH07110995B2 (ja) | 薄膜形成方法および薄膜形成装置 | |
| JPS6396266A (ja) | アモルフアス・シリコン太陽電池の製造装置 | |
| JPH04116155A (ja) | 薄膜の形成方法 | |
| JPH0814025B2 (ja) | アモルファスシリコン膜の形成方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |