JPH031334Y2 - - Google Patents

Info

Publication number
JPH031334Y2
JPH031334Y2 JP5097984U JP5097984U JPH031334Y2 JP H031334 Y2 JPH031334 Y2 JP H031334Y2 JP 5097984 U JP5097984 U JP 5097984U JP 5097984 U JP5097984 U JP 5097984U JP H031334 Y2 JPH031334 Y2 JP H031334Y2
Authority
JP
Japan
Prior art keywords
duct
air
load
self
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5097984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60161664U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5097984U priority Critical patent/JPS60161664U/ja
Publication of JPS60161664U publication Critical patent/JPS60161664U/ja
Application granted granted Critical
Publication of JPH031334Y2 publication Critical patent/JPH031334Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP5097984U 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備 Granted JPS60161664U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5097984U JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5097984U JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Publications (2)

Publication Number Publication Date
JPS60161664U JPS60161664U (ja) 1985-10-26
JPH031334Y2 true JPH031334Y2 (nl) 1991-01-16

Family

ID=30569616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5097984U Granted JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Country Status (1)

Country Link
JP (1) JPS60161664U (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4887804B2 (ja) 2006-01-26 2012-02-29 村田機械株式会社 搬送システム

Also Published As

Publication number Publication date
JPS60161664U (ja) 1985-10-26

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