JPH031334Y2 - - Google Patents
Info
- Publication number
- JPH031334Y2 JPH031334Y2 JP5097984U JP5097984U JPH031334Y2 JP H031334 Y2 JPH031334 Y2 JP H031334Y2 JP 5097984 U JP5097984 U JP 5097984U JP 5097984 U JP5097984 U JP 5097984U JP H031334 Y2 JPH031334 Y2 JP H031334Y2
- Authority
- JP
- Japan
- Prior art keywords
- duct
- air
- load
- self
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5097984U JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5097984U JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60161664U JPS60161664U (ja) | 1985-10-26 |
JPH031334Y2 true JPH031334Y2 (nl) | 1991-01-16 |
Family
ID=30569616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5097984U Granted JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60161664U (nl) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4887804B2 (ja) | 2006-01-26 | 2012-02-29 | 村田機械株式会社 | 搬送システム |
-
1984
- 1984-04-06 JP JP5097984U patent/JPS60161664U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60161664U (ja) | 1985-10-26 |
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