JPH03125061U - - Google Patents
Info
- Publication number
- JPH03125061U JPH03125061U JP3531390U JP3531390U JPH03125061U JP H03125061 U JPH03125061 U JP H03125061U JP 3531390 U JP3531390 U JP 3531390U JP 3531390 U JP3531390 U JP 3531390U JP H03125061 U JPH03125061 U JP H03125061U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- evaporation source
- planetary holder
- electron beam
- positions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3531390U JPH03125061U (enrdf_load_stackoverflow) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3531390U JPH03125061U (enrdf_load_stackoverflow) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125061U true JPH03125061U (enrdf_load_stackoverflow) | 1991-12-18 |
Family
ID=31540557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3531390U Pending JPH03125061U (enrdf_load_stackoverflow) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125061U (enrdf_load_stackoverflow) |
-
1990
- 1990-03-30 JP JP3531390U patent/JPH03125061U/ja active Pending
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