JPH031959U - - Google Patents

Info

Publication number
JPH031959U
JPH031959U JP6153989U JP6153989U JPH031959U JP H031959 U JPH031959 U JP H031959U JP 6153989 U JP6153989 U JP 6153989U JP 6153989 U JP6153989 U JP 6153989U JP H031959 U JPH031959 U JP H031959U
Authority
JP
Japan
Prior art keywords
vapor deposition
source
deposition source
evaporation
window hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6153989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6153989U priority Critical patent/JPH031959U/ja
Publication of JPH031959U publication Critical patent/JPH031959U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP6153989U 1989-05-26 1989-05-26 Pending JPH031959U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6153989U JPH031959U (enrdf_load_stackoverflow) 1989-05-26 1989-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6153989U JPH031959U (enrdf_load_stackoverflow) 1989-05-26 1989-05-26

Publications (1)

Publication Number Publication Date
JPH031959U true JPH031959U (enrdf_load_stackoverflow) 1991-01-10

Family

ID=31589873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6153989U Pending JPH031959U (enrdf_load_stackoverflow) 1989-05-26 1989-05-26

Country Status (1)

Country Link
JP (1) JPH031959U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012184453A (ja) * 2011-03-03 2012-09-27 Seiko Epson Corp 蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012184453A (ja) * 2011-03-03 2012-09-27 Seiko Epson Corp 蒸着装置

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