JPH02110666U - - Google Patents

Info

Publication number
JPH02110666U
JPH02110666U JP1926289U JP1926289U JPH02110666U JP H02110666 U JPH02110666 U JP H02110666U JP 1926289 U JP1926289 U JP 1926289U JP 1926289 U JP1926289 U JP 1926289U JP H02110666 U JPH02110666 U JP H02110666U
Authority
JP
Japan
Prior art keywords
retaining ring
evaporation source
vacuum
notches
tongue piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1926289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527488Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1926289U priority Critical patent/JPH0527488Y2/ja
Publication of JPH02110666U publication Critical patent/JPH02110666U/ja
Application granted granted Critical
Publication of JPH0527488Y2 publication Critical patent/JPH0527488Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1926289U 1989-02-20 1989-02-20 Expired - Lifetime JPH0527488Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1926289U JPH0527488Y2 (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1926289U JPH0527488Y2 (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Publications (2)

Publication Number Publication Date
JPH02110666U true JPH02110666U (enrdf_load_stackoverflow) 1990-09-04
JPH0527488Y2 JPH0527488Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=31234616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1926289U Expired - Lifetime JPH0527488Y2 (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Country Status (1)

Country Link
JP (1) JPH0527488Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0527488Y2 (enrdf_load_stackoverflow) 1993-07-13

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