JPS61162052U - - Google Patents

Info

Publication number
JPS61162052U
JPS61162052U JP4443785U JP4443785U JPS61162052U JP S61162052 U JPS61162052 U JP S61162052U JP 4443785 U JP4443785 U JP 4443785U JP 4443785 U JP4443785 U JP 4443785U JP S61162052 U JPS61162052 U JP S61162052U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
holding hole
external hatch
planet
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4443785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4443785U priority Critical patent/JPS61162052U/ja
Publication of JPS61162052U publication Critical patent/JPS61162052U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4443785U 1985-03-27 1985-03-27 Pending JPS61162052U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4443785U JPS61162052U (enrdf_load_stackoverflow) 1985-03-27 1985-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4443785U JPS61162052U (enrdf_load_stackoverflow) 1985-03-27 1985-03-27

Publications (1)

Publication Number Publication Date
JPS61162052U true JPS61162052U (enrdf_load_stackoverflow) 1986-10-07

Family

ID=30557007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4443785U Pending JPS61162052U (enrdf_load_stackoverflow) 1985-03-27 1985-03-27

Country Status (1)

Country Link
JP (1) JPS61162052U (enrdf_load_stackoverflow)

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