JPH0418655U - - Google Patents

Info

Publication number
JPH0418655U
JPH0418655U JP5680190U JP5680190U JPH0418655U JP H0418655 U JPH0418655 U JP H0418655U JP 5680190 U JP5680190 U JP 5680190U JP 5680190 U JP5680190 U JP 5680190U JP H0418655 U JPH0418655 U JP H0418655U
Authority
JP
Japan
Prior art keywords
vapor deposition
planetarium
concave portion
window
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5680190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5680190U priority Critical patent/JPH0418655U/ja
Publication of JPH0418655U publication Critical patent/JPH0418655U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5680190U 1990-05-29 1990-05-29 Pending JPH0418655U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5680190U JPH0418655U (enrdf_load_stackoverflow) 1990-05-29 1990-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5680190U JPH0418655U (enrdf_load_stackoverflow) 1990-05-29 1990-05-29

Publications (1)

Publication Number Publication Date
JPH0418655U true JPH0418655U (enrdf_load_stackoverflow) 1992-02-17

Family

ID=31580953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5680190U Pending JPH0418655U (enrdf_load_stackoverflow) 1990-05-29 1990-05-29

Country Status (1)

Country Link
JP (1) JPH0418655U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具

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