JPH0238466U - - Google Patents

Info

Publication number
JPH0238466U
JPH0238466U JP11452888U JP11452888U JPH0238466U JP H0238466 U JPH0238466 U JP H0238466U JP 11452888 U JP11452888 U JP 11452888U JP 11452888 U JP11452888 U JP 11452888U JP H0238466 U JPH0238466 U JP H0238466U
Authority
JP
Japan
Prior art keywords
wafer
ring
holder
wafer holder
transport mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11452888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11452888U priority Critical patent/JPH0238466U/ja
Publication of JPH0238466U publication Critical patent/JPH0238466U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP11452888U 1988-08-31 1988-08-31 Pending JPH0238466U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11452888U JPH0238466U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11452888U JPH0238466U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0238466U true JPH0238466U (enrdf_load_stackoverflow) 1990-03-14

Family

ID=31355362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11452888U Pending JPH0238466U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0238466U (enrdf_load_stackoverflow)

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