JPH02108332U - - Google Patents

Info

Publication number
JPH02108332U
JPH02108332U JP1738689U JP1738689U JPH02108332U JP H02108332 U JPH02108332 U JP H02108332U JP 1738689 U JP1738689 U JP 1738689U JP 1738689 U JP1738689 U JP 1738689U JP H02108332 U JPH02108332 U JP H02108332U
Authority
JP
Japan
Prior art keywords
susceptor
tube
reaction tube
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1738689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1738689U priority Critical patent/JPH02108332U/ja
Publication of JPH02108332U publication Critical patent/JPH02108332U/ja
Pending legal-status Critical Current

Links

JP1738689U 1989-02-15 1989-02-15 Pending JPH02108332U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1738689U JPH02108332U (enrdf_load_stackoverflow) 1989-02-15 1989-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1738689U JPH02108332U (enrdf_load_stackoverflow) 1989-02-15 1989-02-15

Publications (1)

Publication Number Publication Date
JPH02108332U true JPH02108332U (enrdf_load_stackoverflow) 1990-08-29

Family

ID=31231125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1738689U Pending JPH02108332U (enrdf_load_stackoverflow) 1989-02-15 1989-02-15

Country Status (1)

Country Link
JP (1) JPH02108332U (enrdf_load_stackoverflow)

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