JPH02132950U - - Google Patents

Info

Publication number
JPH02132950U
JPH02132950U JP4224789U JP4224789U JPH02132950U JP H02132950 U JPH02132950 U JP H02132950U JP 4224789 U JP4224789 U JP 4224789U JP 4224789 U JP4224789 U JP 4224789U JP H02132950 U JPH02132950 U JP H02132950U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
support rod
chamber
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4224789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0719149Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4224789U priority Critical patent/JPH0719149Y2/ja
Publication of JPH02132950U publication Critical patent/JPH02132950U/ja
Application granted granted Critical
Publication of JPH0719149Y2 publication Critical patent/JPH0719149Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Weting (AREA)
JP4224789U 1989-04-10 1989-04-10 二重フオーク横型搬送装置 Expired - Lifetime JPH0719149Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4224789U JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4224789U JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Publications (2)

Publication Number Publication Date
JPH02132950U true JPH02132950U (enrdf_load_stackoverflow) 1990-11-05
JPH0719149Y2 JPH0719149Y2 (ja) 1995-05-01

Family

ID=31553622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4224789U Expired - Lifetime JPH0719149Y2 (ja) 1989-04-10 1989-04-10 二重フオーク横型搬送装置

Country Status (1)

Country Link
JP (1) JPH0719149Y2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100688548B1 (ko) * 2005-05-19 2007-03-02 삼성전자주식회사 웨이퍼 이송 장치
JP2012025504A (ja) * 2010-07-21 2012-02-09 Otsuka Denshi Co Ltd 被搬送物回転装置
WO2014054501A1 (ja) * 2012-10-04 2014-04-10 大陽日酸株式会社 気相成長装置
JP2014075469A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置
JP2014075467A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置
JP2014075468A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8796589B2 (en) * 2001-07-15 2014-08-05 Applied Materials, Inc. Processing system with the dual end-effector handling
JP4067858B2 (ja) * 2002-04-16 2008-03-26 東京エレクトロン株式会社 Ａｌｄ成膜装置およびａｌｄ成膜方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100688548B1 (ko) * 2005-05-19 2007-03-02 삼성전자주식회사 웨이퍼 이송 장치
JP2012025504A (ja) * 2010-07-21 2012-02-09 Otsuka Denshi Co Ltd 被搬送物回転装置
US8327997B2 (en) 2010-07-21 2012-12-11 Otsuka Electronics Co., Ltd. Transferred object rotating device
TWI501913B (zh) * 2010-07-21 2015-10-01 Otsuka Denshi Kk 被搬送物旋轉裝置
WO2014054501A1 (ja) * 2012-10-04 2014-04-10 大陽日酸株式会社 気相成長装置
JP2014075469A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置
JP2014075467A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置
JP2014075468A (ja) * 2012-10-04 2014-04-24 Taiyo Nippon Sanso Corp 気相成長装置

Also Published As

Publication number Publication date
JPH0719149Y2 (ja) 1995-05-01

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Legal Events

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EXPY Cancellation because of completion of term