JPH0124926Y2 - - Google Patents

Info

Publication number
JPH0124926Y2
JPH0124926Y2 JP2259984U JP2259984U JPH0124926Y2 JP H0124926 Y2 JPH0124926 Y2 JP H0124926Y2 JP 2259984 U JP2259984 U JP 2259984U JP 2259984 U JP2259984 U JP 2259984U JP H0124926 Y2 JPH0124926 Y2 JP H0124926Y2
Authority
JP
Japan
Prior art keywords
door
cantilever
boat
furnace
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2259984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60136135U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2259984U priority Critical patent/JPS60136135U/ja
Publication of JPS60136135U publication Critical patent/JPS60136135U/ja
Application granted granted Critical
Publication of JPH0124926Y2 publication Critical patent/JPH0124926Y2/ja
Granted legal-status Critical Current

Links

JP2259984U 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置 Granted JPS60136135U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2259984U JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2259984U JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Publications (2)

Publication Number Publication Date
JPS60136135U JPS60136135U (ja) 1985-09-10
JPH0124926Y2 true JPH0124926Y2 (enrdf_load_stackoverflow) 1989-07-27

Family

ID=30515044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2259984U Granted JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Country Status (1)

Country Link
JP (1) JPS60136135U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526370A (ja) * 2001-05-14 2005-09-02 セムコ エンジニアリング エス．アー． 減圧下でのシリコンウェーハのドーピング、拡散、および酸化の方法と装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526370A (ja) * 2001-05-14 2005-09-02 セムコ エンジニアリング エス．アー． 減圧下でのシリコンウェーハのドーピング、拡散、および酸化の方法と装置

Also Published As

Publication number Publication date
JPS60136135U (ja) 1985-09-10

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