JPH0299959U - - Google Patents

Info

Publication number
JPH0299959U
JPH0299959U JP665789U JP665789U JPH0299959U JP H0299959 U JPH0299959 U JP H0299959U JP 665789 U JP665789 U JP 665789U JP 665789 U JP665789 U JP 665789U JP H0299959 U JPH0299959 U JP H0299959U
Authority
JP
Japan
Prior art keywords
electrode rod
vapor
substrate
vacuum container
vapor source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP665789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP665789U priority Critical patent/JPH0299959U/ja
Publication of JPH0299959U publication Critical patent/JPH0299959U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP665789U 1989-01-24 1989-01-24 Pending JPH0299959U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP665789U JPH0299959U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP665789U JPH0299959U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Publications (1)

Publication Number Publication Date
JPH0299959U true JPH0299959U (enrdf_load_stackoverflow) 1990-08-09

Family

ID=31211008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP665789U Pending JPH0299959U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Country Status (1)

Country Link
JP (1) JPH0299959U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102421933A (zh) * 2009-05-07 2012-04-18 韩商Snu精密股份有限公司 薄膜沉积装置及其系统
JP2012522137A (ja) * 2009-03-31 2012-09-20 エスエヌユー プレシジョン カンパニー リミテッド 薄膜蒸着装置と薄膜蒸着方法及び薄膜蒸着システム
JP2013533922A (ja) * 2010-06-10 2013-08-29 エスエヌユー プレシジョン カンパニー リミテッド 薄膜蒸着装置及び薄膜蒸着システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012522137A (ja) * 2009-03-31 2012-09-20 エスエヌユー プレシジョン カンパニー リミテッド 薄膜蒸着装置と薄膜蒸着方法及び薄膜蒸着システム
CN102421933A (zh) * 2009-05-07 2012-04-18 韩商Snu精密股份有限公司 薄膜沉积装置及其系统
JP2012526199A (ja) * 2009-05-07 2012-10-25 エスエヌユー プレシジョン カンパニー リミテッド 薄膜蒸着装置およびこれを備える薄膜蒸着システム
JP2013533922A (ja) * 2010-06-10 2013-08-29 エスエヌユー プレシジョン カンパニー リミテッド 薄膜蒸着装置及び薄膜蒸着システム

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