JPH0194453U - - Google Patents

Info

Publication number
JPH0194453U
JPH0194453U JP18778787U JP18778787U JPH0194453U JP H0194453 U JPH0194453 U JP H0194453U JP 18778787 U JP18778787 U JP 18778787U JP 18778787 U JP18778787 U JP 18778787U JP H0194453 U JPH0194453 U JP H0194453U
Authority
JP
Japan
Prior art keywords
shutter
target
electrode
supply means
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18778787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18778787U priority Critical patent/JPH0194453U/ja
Publication of JPH0194453U publication Critical patent/JPH0194453U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18778787U 1987-12-11 1987-12-11 Pending JPH0194453U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18778787U JPH0194453U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18778787U JPH0194453U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Publications (1)

Publication Number Publication Date
JPH0194453U true JPH0194453U (enrdf_load_stackoverflow) 1989-06-21

Family

ID=31699797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18778787U Pending JPH0194453U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0194453U (enrdf_load_stackoverflow)

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