JPH02140969U - - Google Patents

Info

Publication number
JPH02140969U
JPH02140969U JP4645589U JP4645589U JPH02140969U JP H02140969 U JPH02140969 U JP H02140969U JP 4645589 U JP4645589 U JP 4645589U JP 4645589 U JP4645589 U JP 4645589U JP H02140969 U JPH02140969 U JP H02140969U
Authority
JP
Japan
Prior art keywords
center
annular rail
fixed
around
rotation shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4645589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0718757Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4645589U priority Critical patent/JPH0718757Y2/ja
Publication of JPH02140969U publication Critical patent/JPH02140969U/ja
Application granted granted Critical
Publication of JPH0718757Y2 publication Critical patent/JPH0718757Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4645589U 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具 Expired - Lifetime JPH0718757Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645589U JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645589U JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Publications (2)

Publication Number Publication Date
JPH02140969U true JPH02140969U (enrdf_load_stackoverflow) 1990-11-26
JPH0718757Y2 JPH0718757Y2 (ja) 1995-05-01

Family

ID=31561550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645589U Expired - Lifetime JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Country Status (1)

Country Link
JP (1) JPH0718757Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0718757Y2 (ja) 1995-05-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term