JPH0718757Y2 - 蒸着装置用プラネタリ治具 - Google Patents

蒸着装置用プラネタリ治具

Info

Publication number
JPH0718757Y2
JPH0718757Y2 JP4645589U JP4645589U JPH0718757Y2 JP H0718757 Y2 JPH0718757 Y2 JP H0718757Y2 JP 4645589 U JP4645589 U JP 4645589U JP 4645589 U JP4645589 U JP 4645589U JP H0718757 Y2 JPH0718757 Y2 JP H0718757Y2
Authority
JP
Japan
Prior art keywords
arms
annular rail
fixed
substrate holder
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4645589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02140969U (enrdf_load_stackoverflow
Inventor
庸宏 土師
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP4645589U priority Critical patent/JPH0718757Y2/ja
Publication of JPH02140969U publication Critical patent/JPH02140969U/ja
Application granted granted Critical
Publication of JPH0718757Y2 publication Critical patent/JPH0718757Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4645589U 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具 Expired - Lifetime JPH0718757Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645589U JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645589U JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Publications (2)

Publication Number Publication Date
JPH02140969U JPH02140969U (enrdf_load_stackoverflow) 1990-11-26
JPH0718757Y2 true JPH0718757Y2 (ja) 1995-05-01

Family

ID=31561550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645589U Expired - Lifetime JPH0718757Y2 (ja) 1989-04-20 1989-04-20 蒸着装置用プラネタリ治具

Country Status (1)

Country Link
JP (1) JPH0718757Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02140969U (enrdf_load_stackoverflow) 1990-11-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term