JPS63174158U - - Google Patents

Info

Publication number
JPS63174158U
JPS63174158U JP1518287U JP1518287U JPS63174158U JP S63174158 U JPS63174158 U JP S63174158U JP 1518287 U JP1518287 U JP 1518287U JP 1518287 U JP1518287 U JP 1518287U JP S63174158 U JPS63174158 U JP S63174158U
Authority
JP
Japan
Prior art keywords
electron beam
faraday cup
rotary table
code plate
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1518287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548355Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1518287U priority Critical patent/JPH0548355Y2/ja
Publication of JPS63174158U publication Critical patent/JPS63174158U/ja
Application granted granted Critical
Publication of JPH0548355Y2 publication Critical patent/JPH0548355Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP1518287U 1987-02-04 1987-02-04 Expired - Lifetime JPH0548355Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1518287U JPH0548355Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1518287U JPH0548355Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Publications (2)

Publication Number Publication Date
JPS63174158U true JPS63174158U (enrdf_load_stackoverflow) 1988-11-11
JPH0548355Y2 JPH0548355Y2 (enrdf_load_stackoverflow) 1993-12-24

Family

ID=30805876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1518287U Expired - Lifetime JPH0548355Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPH0548355Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0548355Y2 (enrdf_load_stackoverflow) 1993-12-24

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