JPH01117552U - - Google Patents

Info

Publication number
JPH01117552U
JPH01117552U JP1398388U JP1398388U JPH01117552U JP H01117552 U JPH01117552 U JP H01117552U JP 1398388 U JP1398388 U JP 1398388U JP 1398388 U JP1398388 U JP 1398388U JP H01117552 U JPH01117552 U JP H01117552U
Authority
JP
Japan
Prior art keywords
manipulator
substrate
electron beam
shielding plate
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1398388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1398388U priority Critical patent/JPH01117552U/ja
Publication of JPH01117552U publication Critical patent/JPH01117552U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1398388U 1988-02-03 1988-02-03 Pending JPH01117552U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1398388U JPH01117552U (enrdf_load_stackoverflow) 1988-02-03 1988-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1398388U JPH01117552U (enrdf_load_stackoverflow) 1988-02-03 1988-02-03

Publications (1)

Publication Number Publication Date
JPH01117552U true JPH01117552U (enrdf_load_stackoverflow) 1989-08-08

Family

ID=31224770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1398388U Pending JPH01117552U (enrdf_load_stackoverflow) 1988-02-03 1988-02-03

Country Status (1)

Country Link
JP (1) JPH01117552U (enrdf_load_stackoverflow)

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