JPH0548355Y2 - - Google Patents
Info
- Publication number
- JPH0548355Y2 JPH0548355Y2 JP1518287U JP1518287U JPH0548355Y2 JP H0548355 Y2 JPH0548355 Y2 JP H0548355Y2 JP 1518287 U JP1518287 U JP 1518287U JP 1518287 U JP1518287 U JP 1518287U JP H0548355 Y2 JPH0548355 Y2 JP H0548355Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- faraday cup
- code plate
- rotary table
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 37
- 238000000609 electron-beam lithography Methods 0.000 claims description 9
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518287U JPH0548355Y2 (enrdf_load_stackoverflow) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518287U JPH0548355Y2 (enrdf_load_stackoverflow) | 1987-02-04 | 1987-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174158U JPS63174158U (enrdf_load_stackoverflow) | 1988-11-11 |
| JPH0548355Y2 true JPH0548355Y2 (enrdf_load_stackoverflow) | 1993-12-24 |
Family
ID=30805876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1518287U Expired - Lifetime JPH0548355Y2 (enrdf_load_stackoverflow) | 1987-02-04 | 1987-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548355Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-04 JP JP1518287U patent/JPH0548355Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63174158U (enrdf_load_stackoverflow) | 1988-11-11 |
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