JPH0238927Y2 - - Google Patents

Info

Publication number
JPH0238927Y2
JPH0238927Y2 JP1982187349U JP18734982U JPH0238927Y2 JP H0238927 Y2 JPH0238927 Y2 JP H0238927Y2 JP 1982187349 U JP1982187349 U JP 1982187349U JP 18734982 U JP18734982 U JP 18734982U JP H0238927 Y2 JPH0238927 Y2 JP H0238927Y2
Authority
JP
Japan
Prior art keywords
rail
workpiece
standby
main rail
cylindrical chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982187349U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5991360U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18734982U priority Critical patent/JPS5991360U/ja
Publication of JPS5991360U publication Critical patent/JPS5991360U/ja
Application granted granted Critical
Publication of JPH0238927Y2 publication Critical patent/JPH0238927Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP18734982U 1982-12-12 1982-12-12 反応性蒸着膜形成装置 Granted JPS5991360U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Publications (2)

Publication Number Publication Date
JPS5991360U JPS5991360U (ja) 1984-06-21
JPH0238927Y2 true JPH0238927Y2 (enrdf_load_stackoverflow) 1990-10-19

Family

ID=30404428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18734982U Granted JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Country Status (1)

Country Link
JP (1) JPS5991360U (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
JPS5917192B2 (ja) * 1980-08-05 1984-04-19 日本真空技術株式会社 真空処理装置
JPS5912867U (ja) * 1982-07-19 1984-01-26 富士電機株式会社 電子写真用感光体製造装置

Also Published As

Publication number Publication date
JPS5991360U (ja) 1984-06-21

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