JPS5991360U - 反応性蒸着膜形成装置 - Google Patents

反応性蒸着膜形成装置

Info

Publication number
JPS5991360U
JPS5991360U JP18734982U JP18734982U JPS5991360U JP S5991360 U JPS5991360 U JP S5991360U JP 18734982 U JP18734982 U JP 18734982U JP 18734982 U JP18734982 U JP 18734982U JP S5991360 U JPS5991360 U JP S5991360U
Authority
JP
Japan
Prior art keywords
rail
vapor deposition
deposition film
reactive vapor
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18734982U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238927Y2 (enrdf_load_stackoverflow
Inventor
竹内　広達
俊雄 御器谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shiroki Corp
Original Assignee
Shiroki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shiroki Corp filed Critical Shiroki Corp
Priority to JP18734982U priority Critical patent/JPS5991360U/ja
Publication of JPS5991360U publication Critical patent/JPS5991360U/ja
Application granted granted Critical
Publication of JPH0238927Y2 publication Critical patent/JPH0238927Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP18734982U 1982-12-12 1982-12-12 反応性蒸着膜形成装置 Granted JPS5991360U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Publications (2)

Publication Number Publication Date
JPS5991360U true JPS5991360U (ja) 1984-06-21
JPH0238927Y2 JPH0238927Y2 (enrdf_load_stackoverflow) 1990-10-19

Family

ID=30404428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18734982U Granted JPS5991360U (ja) 1982-12-12 1982-12-12 反応性蒸着膜形成装置

Country Status (1)

Country Link
JP (1) JPS5991360U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (ja) * 1982-07-19 1984-01-26 富士電機株式会社 電子写真用感光体製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (ja) * 1982-07-19 1984-01-26 富士電機株式会社 電子写真用感光体製造装置

Also Published As

Publication number Publication date
JPH0238927Y2 (enrdf_load_stackoverflow) 1990-10-19

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