JPS5991360U - Reactive vapor deposition film forming equipment - Google Patents

Reactive vapor deposition film forming equipment

Info

Publication number
JPS5991360U
JPS5991360U JP18734982U JP18734982U JPS5991360U JP S5991360 U JPS5991360 U JP S5991360U JP 18734982 U JP18734982 U JP 18734982U JP 18734982 U JP18734982 U JP 18734982U JP S5991360 U JPS5991360 U JP S5991360U
Authority
JP
Japan
Prior art keywords
rail
vapor deposition
deposition film
reactive vapor
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18734982U
Other languages
Japanese (ja)
Other versions
JPH0238927Y2 (en
Inventor
竹内　広達
俊雄 御器谷
Original Assignee
シロキ工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シロキ工業株式会社 filed Critical シロキ工業株式会社
Priority to JP18734982U priority Critical patent/JPS5991360U/en
Publication of JPS5991360U publication Critical patent/JPS5991360U/en
Application granted granted Critical
Publication of JPH0238927Y2 publication Critical patent/JPH0238927Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、この考案の一実施例を示すもので、第１図はこ
の考案の概略正面図、第２図は第１図の■−■線一部省
略拡大断面図、第３図は筒形チャンバーからカル−セル
アッセンブリを移動させる状態を示す説明図、第４図は
この考案の概略平面図、第５図は第４図に示すレールの
切替部を示す拡大平面図、第６図はカル−セルアッセン
ブリをレール上に支持する支持体の底部に設けた車輪を
示す拡大縦断面図である。 １・・・筒形チャンバー、２・・・被処理物、１１・・
・主レール、１２・・・待機レール、１３・・・切替ポ
イント、１６・・・カル−セルアッセンブリ、１７・・
・ホルダー、１８・・・蓋、１９・・・車輪。The drawings show one embodiment of this invention. Fig. 1 is a schematic front view of this invention, Fig. 2 is an enlarged sectional view taken along the line ■-■ in Fig. 1, and Fig. 3 is a cylindrical shape. An explanatory diagram showing the state in which the car cell assembly is moved from the chamber, Fig. 4 is a schematic plan view of this invention, Fig. 5 is an enlarged plan view showing the switching section of the rail shown in Fig. 4, and Fig. 6 is a schematic plan view of the car cell assembly. - an enlarged longitudinal section showing the wheels provided at the bottom of the support supporting the cell assembly on the rail; 1... Cylindrical chamber, 2... Processed object, 11...
・Main rail, 12...Standby rail, 13...Switching point, 16...Carcell assembly, 17...
・Holder, 18...lid, 19...wheel.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被処理物の外表面に反応性蒸着膜を形成する筒形チャン
バーを床面上に水平に設置し、同筒形チャンバーの軸心
線と平行な主レールと直交する待機レールを床面上に同
一高さに敷設して、該レール上に被処理物を水平に支持
するホルダーと該ホルダーの基部側に上記筒形チャンバ
ー閉鎖用の蓋を具えたカル−セルアッセンブリを走行自
在に載せ、上記主レールと待機レールの交叉部には９０
°旋回式の切換ポイントを設けるとともに、カル−セル
アッセンブリには該切替ポイントの旋回に追従して水平
に旋回する車輪を設けたことを特徴とする、反応性蒸着
膜形成装置。A cylindrical chamber that forms a reactive vapor deposition film on the outer surface of the workpiece is installed horizontally on the floor, and a standby rail that is perpendicular to the main rail that is parallel to the axis of the cylindrical chamber is placed on the floor. A car cell assembly including a holder for horizontally supporting the object to be processed and a lid for closing the cylindrical chamber on the base side of the holder is placed on the rail at the same height, and the car cell assembly is movably mounted on the rail. 90 at the intersection of the main rail and standby rail
A reactive vapor deposition film forming apparatus, characterized in that a turning type switching point is provided, and the carcell assembly is provided with wheels that horizontally turn to follow the turning of the switching point.
JP18734982U 1982-12-12 1982-12-12 Reactive vapor deposition film forming equipment Granted JPS5991360U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (en) 1982-12-12 1982-12-12 Reactive vapor deposition film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18734982U JPS5991360U (en) 1982-12-12 1982-12-12 Reactive vapor deposition film forming equipment

Publications (2)

Publication Number Publication Date
JPS5991360U true JPS5991360U (en) 1984-06-21
JPH0238927Y2 JPH0238927Y2 (en) 1990-10-19

Family

ID=30404428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18734982U Granted JPS5991360U (en) 1982-12-12 1982-12-12 Reactive vapor deposition film forming equipment

Country Status (1)

Country Link
JP (1) JPS5991360U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (en) * 1982-07-19 1984-01-26 富士電機株式会社 Photoreceptor manufacturing equipment for electrophotography

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912867B2 (en) * 1975-10-13 1984-03-26 日産自動車株式会社 Inspection device for electronic fuel injection system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (en) * 1982-07-19 1984-01-26 富士電機株式会社 Photoreceptor manufacturing equipment for electrophotography

Also Published As

Publication number Publication date
JPH0238927Y2 (en) 1990-10-19

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