JPS5991361U - Film deposition equipment - Google Patents

Film deposition equipment

Info

Publication number
JPS5991361U
JPS5991361U JP18735082U JP18735082U JPS5991361U JP S5991361 U JPS5991361 U JP S5991361U JP 18735082 U JP18735082 U JP 18735082U JP 18735082 U JP18735082 U JP 18735082U JP S5991361 U JPS5991361 U JP S5991361U
Authority
JP
Japan
Prior art keywords
film deposition
deposition equipment
cylindrical chamber
rail
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18735082U
Other languages
Japanese (ja)
Other versions
JPH0238928Y2 (en
Inventor
竹内　広達
俊雄 御器谷
Original Assignee
日東工器株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東工器株式会社 filed Critical 日東工器株式会社
Priority to JP18735082U priority Critical patent/JPS5991361U/en
Publication of JPS5991361U publication Critical patent/JPS5991361U/en
Application granted granted Critical
Publication of JPH0238928Y2 publication Critical patent/JPH0238928Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面はこの考案の一実施例を示すもので、第１図はこの
考案の概略正面図、第２図はカル−セルアッセンブリを
レール上走行させた状態を示す説明図、第３図はこの考
案の概略平面図である。 １・・・筒形チャンバー、２・・・被処理物、４・・・
開口端部、１０・・・レール、１６・・・カル−セルア
ッセンブリ、１７・・・ホルダー、１８・・・垂直蓋。 ［／２　ｆ−−−Ｉｆ″、０ ト十 １１１　　　　　　１ 、ｂ　ｄ　　　　　　　／　　　　　　　　　　　　　
　　　θ１／　　　　−／−７The drawings show one embodiment of this invention; Fig. 1 is a schematic front view of this invention, Fig. 2 is an explanatory diagram showing a car cell assembly running on a rail, and Fig. 3 is an illustration of this invention. FIG. 1... Cylindrical chamber, 2... Processed object, 4...
Opening end, 10...Rail, 16...Carcell assembly, 17...Holder, 18...Vertical lid. [/2 f---If'', 0 t111 1, b d /
θ1/-/-7

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被処理物の外表面に被膜を蒸着させるための一端部が開
口のままの筒形チャンバーを床面上に水平に設置し、同
筒形チャンバーの真下床面上にはレールを水平に敷設し
て、該レール上には、被処理物を水平に支持するホルダ
ーと該ホルダーの基部側に上記筒形チャンバーの開口端
を閉鎖する垂直蓋を固定したカルーセルアッセンブリ牽
走行自在に載せたことを特徴とする被膜蒸着装置。A cylindrical chamber with one end open to deposit a film on the outer surface of the object to be treated is installed horizontally on the floor, and a rail is laid horizontally on the floor directly below the cylindrical chamber. A carousel assembly having a holder for horizontally supporting the object to be processed and a vertical lid fixed to the base side of the holder for closing the open end of the cylindrical chamber is mounted on the rail so as to be freely towable. Film deposition equipment for
JP18735082U 1982-12-12 1982-12-12 Film deposition equipment Granted JPS5991361U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18735082U JPS5991361U (en) 1982-12-12 1982-12-12 Film deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18735082U JPS5991361U (en) 1982-12-12 1982-12-12 Film deposition equipment

Publications (2)

Publication Number Publication Date
JPS5991361U true JPS5991361U (en) 1984-06-21
JPH0238928Y2 JPH0238928Y2 (en) 1990-10-19

Family

ID=30404430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18735082U Granted JPS5991361U (en) 1982-12-12 1982-12-12 Film deposition equipment

Country Status (1)

Country Link
JP (1) JPS5991361U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (en) * 1982-07-19 1984-01-26 富士電機株式会社 Photoreceptor manufacturing equipment for electrophotography

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912867B2 (en) * 1975-10-13 1984-03-26 日産自動車株式会社 Inspection device for electronic fuel injection system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS5732368A (en) * 1980-08-05 1982-02-22 Ulvac Corp Vacuum treating apparatus
JPS5912867U (en) * 1982-07-19 1984-01-26 富士電機株式会社 Photoreceptor manufacturing equipment for electrophotography

Also Published As

Publication number Publication date
JPH0238928Y2 (en) 1990-10-19

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