JPS5732368A - Vacuum treating apparatus - Google Patents
Vacuum treating apparatusInfo
- Publication number
- JPS5732368A JPS5732368A JP10677180A JP10677180A JPS5732368A JP S5732368 A JPS5732368 A JP S5732368A JP 10677180 A JP10677180 A JP 10677180A JP 10677180 A JP10677180 A JP 10677180A JP S5732368 A JPS5732368 A JP S5732368A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- frame
- treating apparatus
- working
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Abstract
PURPOSE:To support the working member of a treating apparatus stably and firmly without increasing the size of the apparatus by making the front and the bottom of the vacuum tank openable and forming a frame interlocking with the tank by using a front plate and a bottom plate. CONSTITUTION:As a vacuum tank 1 caseing type tank with the front 3 and the bottom 4 opened is used. A frame 7 composed of a front plate 5 and a bottom plate 6 is prepared in front of the tank 1, and by joining the tank 1 and the frame 7 together, the interior of the tank 1 is sealed airtightly. Since a working member 2 is supported on the frame 7, the member 2 is stabilized to prevent vibration or other trouble. The tank 1 is connected to a carriage 9 through links 13, and by working a cylinder 14, the tank 1 is pushed forward the downward to ensure the shutting between the tank 1 and the frame 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10677180A JPS5917192B2 (en) | 1980-08-05 | 1980-08-05 | Vacuum processing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10677180A JPS5917192B2 (en) | 1980-08-05 | 1980-08-05 | Vacuum processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5732368A true JPS5732368A (en) | 1982-02-22 |
JPS5917192B2 JPS5917192B2 (en) | 1984-04-19 |
Family
ID=14442163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10677180A Expired JPS5917192B2 (en) | 1980-08-05 | 1980-08-05 | Vacuum processing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917192B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5991360U (en) * | 1982-12-12 | 1984-06-21 | シロキ工業株式会社 | Reactive vapor deposition film forming equipment |
JPS5991361U (en) * | 1982-12-12 | 1984-06-21 | 日東工器株式会社 | Film deposition equipment |
JPS59107071A (en) * | 1982-12-12 | 1984-06-21 | Nitto Kohki Co Ltd | Device for forming reactive vapor deposited film on outside surface of object to be treated |
JPS6016755U (en) * | 1982-12-12 | 1985-02-04 | 白木金属工業株式会社 | Film deposition equipment |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06240443A (en) * | 1992-12-26 | 1994-08-30 | Sony Corp | Device for producing thin film in vacuum and production of magnetic recording medium using the same |
-
1980
- 1980-08-05 JP JP10677180A patent/JPS5917192B2/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5991360U (en) * | 1982-12-12 | 1984-06-21 | シロキ工業株式会社 | Reactive vapor deposition film forming equipment |
JPS5991361U (en) * | 1982-12-12 | 1984-06-21 | 日東工器株式会社 | Film deposition equipment |
JPS59107071A (en) * | 1982-12-12 | 1984-06-21 | Nitto Kohki Co Ltd | Device for forming reactive vapor deposited film on outside surface of object to be treated |
JPS6016755U (en) * | 1982-12-12 | 1985-02-04 | 白木金属工業株式会社 | Film deposition equipment |
JPS6214218B2 (en) * | 1982-12-12 | 1987-04-01 | Nitto Kohki Co | |
JPH0238928Y2 (en) * | 1982-12-12 | 1990-10-19 | ||
JPH0238927Y2 (en) * | 1982-12-12 | 1990-10-19 |
Also Published As
Publication number | Publication date |
---|---|
JPS5917192B2 (en) | 1984-04-19 |
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