JPS5917192B2 - Vacuum processing equipment - Google Patents

Description

[Detailed description of the invention] The present invention relates to vacuum processing equipment for vacuum evaporation and other vacuum processing.

Conventionally, in this type of apparatus, for example, as shown in FIG. 1, a substrate is wound and run in a vacuum tank a.

A type in which the winding mechanism and other operating members b are provided in a manner that allows them to be moved in and out is known, but in this case, the tank a is of the type with an open front as shown in the figure, and a a front plate c for closing the actuating member b;
was established in support of this. This is a general formula for
In such a device, the actuating member b is supported in a cantilever manner with respect to the front plate c, so it is difficult to obtain a sufficiently strong support. According to , this has the disadvantage of causing vibration. Conventionally, in order to eliminate such inconveniences, it has been attempted to increase the size of the bracket and other supporting members, but this reduces the volume inside the tank, thus requiring the overall size to be increased. This is accompanied by other inconveniences. In the illustrated case, the tank a
was fixed to the floor d, and the front plate c was attached to a trolley e so that it could move freely. The object of the present invention is to obtain a device free from such inconveniences, and in which a winding mechanism and other operating members are provided in a vacuum tank so that they can be freely entered and exited, the tank has a front surface and a bottom surface. The hood is configured in the form of a door-like frame housing that opens, and has a front plate that closes the front plate when it overlaps with the front surface, and a bottom plate that closes it when it overlaps with the lower surface. The machine is characterized in that it includes a frame and the actuating member is provided on the machine frame.

o An example of implementing the present invention will be explained with reference to the attached drawings.

FIG. 2 shows one example, in which 1 is a vacuum tank, 2 is an operating member, and the member 2 is comprised of a winding mechanism for winding and running a synthetic resin film or other substrate. 5. As clearly shown in the figure, the tank 1 is constructed in the form of a hood-like frame case with an open front surface 3 and a lower surface 4, and there is a wall in front of the tank 1 that overlaps with the front surface 3 before closing. A machine frame T with an L-shaped cross section is prepared, consisting of a face plate 5 and a bottom plate 6 which closes the bottom plate 6 by overlapping with the lower surface 4, and thus the tank 1 is formed by the machine frame, ? By connecting it to the operating member 2, the interior thereof can be closed airtight, and furthermore, the above-mentioned operating member 2
This is supported on the machine frame 1.

In the illustrated example, the machine frame 7 is fixed on the floor 8,
Thus, compared to the conventional type which is a trolley type, the member 2
The tank 1 is made to be able to run freely on the rails 8a on the floor surface 8 on the wheels 9a' of the truck 9 on the lower surface.

As described above, the tank 1 is hermetically closed when connected to the machine frame 7, and at least one of the overlapping surfaces of the tank 1 and the machine frame 7 is provided with a sealing member 10 such as rubber. shall be applied in advance. In the drawings, reference numeral 11 indicates a support member that supports the outer end of the operating member 2, and the member 11 is attached to the bottom plate 6.
planted on top. In the drawings, reference numeral 12 indicates an exhaust port extending outward from the front plate 5. To explain its operation, when the vacuum tank 1 and the machine frame 7 are opened to each other as shown in the figure, and then closed to each other, the inside of the tank 1 becomes airtight and the operating member 2 is housed inside. In this way, the inside of the tantalum 1 can be evacuated and the actuating member 2 can be operated to perform vacuum evaporation or other vacuum processing of the substrate. be prepared for replacement and other work.

In addition, during such operation, the operating member 2 has a front plate 5 and a bottom plate 6.
The support is more stable and robust than conventional cantilever support, and does not cause problems such as vibration. Furthermore, in the illustrated example, a pair of front and rear links 13 on each side of the tank 1 are mounted on the cart 9 on which the tank 1 is mounted.
13, and is provided with an actuating cylinder 14 at its rear that presses the tank 1. Accordingly, when the cylinder 14 operates, the tank 1 is pushed forward and downward, and the space between the tank 1 and the machine frame 7 mentioned above is pushed. The closure can be easily and reliably obtained.
As described above, according to the present invention, the vacuum tank is of a type in which the front and bottom surfaces are open, and the machine frame that cooperates with the tank is composed of a front plate and a bottom plate, on which the operating member is supported. This has the effect of eliminating the above-mentioned disadvantages of the conventional structure in which the structure is cantilevered.

[Brief explanation of the drawing]

FIG. 1 is a side view of a conventional example, and FIG. 2 is a perspective view of an example of the apparatus of the present invention. 1... Vacuum tank, 2... Operating member,
3...Front surface, 4...Bottom surface, 5...
...Front plate, 6...Bottom plate, 7...Machine frame.

Claims (1)

[Claims] 1. In a type in which a winding mechanism and other operating members are installed in a vacuum tank so that they can be freely accessed and removed, the tank is structured into a hood-like frame with an open front and bottom surface, and a A front plate that closes this according to polymerization,
A vacuum processing apparatus comprising a machine frame comprising a bottom plate that closes the bottom plate by overlapping with the lower surface, and the operating member is provided on the machine frame.