JPS6082460U - Substrate holder for vacuum evaporation equipment - Google Patents
Substrate holder for vacuum evaporation equipmentInfo
- Publication number
- JPS6082460U JPS6082460U JP17577083U JP17577083U JPS6082460U JP S6082460 U JPS6082460 U JP S6082460U JP 17577083 U JP17577083 U JP 17577083U JP 17577083 U JP17577083 U JP 17577083U JP S6082460 U JPS6082460 U JP S6082460U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- vacuum evaporation
- evaporation equipment
- substantially cylindrical
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の基板ホルダーを備えた蒸着槽の概略
断面図、第２図はこの考案の基板ホルダーの実施例を示
す平面図、第３図はこの正面図、第４図は右側面図、第
５図は第２図の線Ａ−Ａに沿った断面図である。
図中、１０は基板ホルダー、１０ａは基板ホルダ一本体
、１０ｂは基板ホルダー扉部、１６は蒸着室、２４は回
転リング、２６は蒸発源、４ｏは周面、４２は開口、４
８は蝶番、５０はボールキャッチである。Fig. 1 is a schematic cross-sectional view of a deposition tank equipped with a substrate holder of this invention, Fig. 2 is a plan view showing an embodiment of the substrate holder of this invention, Fig. 3 is a front view thereof, and Fig. 4 is a right side view. FIG. 5 is a sectional view taken along line A--A in FIG. 2. In the figure, 10 is a substrate holder, 10a is a substrate holder body, 10b is a substrate holder door, 16 is a deposition chamber, 24 is a rotating ring, 26 is an evaporation source, 4o is a peripheral surface, 42 is an opening, 4
8 is the hinge and 50 is the ball catch.
Claims (1)
ーであって、この略円筒状基板ホルダーの周面の一部が
開閉自在に構成されていることを特−とする真空蒸着装
置用基板ホルダー。A vacuum evaporation method comprising: a substantially cylindrical substrate holder that is erected with an evaporation source disposed therein; and a part of the circumferential surface of the substantially cylindrical substrate holder is configured to be openable and closable. Board holder for equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17577083U JPS6082460U (en) | 1983-11-11 | 1983-11-11 | Substrate holder for vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17577083U JPS6082460U (en) | 1983-11-11 | 1983-11-11 | Substrate holder for vacuum evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6082460U true JPS6082460U (en) | 1985-06-07 |
Family
ID=30382312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17577083U Pending JPS6082460U (en) | 1983-11-11 | 1983-11-11 | Substrate holder for vacuum evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6082460U (en) |
-
1983
- 1983-11-11 JP JP17577083U patent/JPS6082460U/en active Pending
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