JPH0136910Y2 - - Google Patents
Info
- Publication number
- JPH0136910Y2 JPH0136910Y2 JP12963088U JP12963088U JPH0136910Y2 JP H0136910 Y2 JPH0136910 Y2 JP H0136910Y2 JP 12963088 U JP12963088 U JP 12963088U JP 12963088 U JP12963088 U JP 12963088U JP H0136910 Y2 JPH0136910 Y2 JP H0136910Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- anode
- sputtering
- cylindrical
- vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 14
- 241000239290 Araneae Species 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 2
- 239000013077 target material Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 3
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000008685 targeting Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963088U JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963088U JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0162357U JPH0162357U (enrdf_load_stackoverflow) | 1989-04-20 |
| JPH0136910Y2 true JPH0136910Y2 (enrdf_load_stackoverflow) | 1989-11-08 |
Family
ID=31384082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12963088U Expired JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0136910Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-10-04 JP JP12963088U patent/JPH0136910Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0162357U (enrdf_load_stackoverflow) | 1989-04-20 |
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