JPH0162357U - - Google Patents
Info
- Publication number
- JPH0162357U JPH0162357U JP12963088U JP12963088U JPH0162357U JP H0162357 U JPH0162357 U JP H0162357U JP 12963088 U JP12963088 U JP 12963088U JP 12963088 U JP12963088 U JP 12963088U JP H0162357 U JPH0162357 U JP H0162357U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- anode
- target
- cylindrical
- anodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 241000239290 Araneae Species 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 239000013077 target material Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963088U JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963088U JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0162357U true JPH0162357U (enrdf_load_stackoverflow) | 1989-04-20 |
| JPH0136910Y2 JPH0136910Y2 (enrdf_load_stackoverflow) | 1989-11-08 |
Family
ID=31384082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12963088U Expired JPH0136910Y2 (enrdf_load_stackoverflow) | 1988-10-04 | 1988-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0136910Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-10-04 JP JP12963088U patent/JPH0136910Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0136910Y2 (enrdf_load_stackoverflow) | 1989-11-08 |
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