JPH0311648Y2 - - Google Patents
Info
- Publication number
- JPH0311648Y2 JPH0311648Y2 JP6685186U JP6685186U JPH0311648Y2 JP H0311648 Y2 JPH0311648 Y2 JP H0311648Y2 JP 6685186 U JP6685186 U JP 6685186U JP 6685186 U JP6685186 U JP 6685186U JP H0311648 Y2 JPH0311648 Y2 JP H0311648Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- wall
- air
- room
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Elimination Of Static Electricity (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6685186U JPH0311648Y2 (zh) | 1986-05-01 | 1986-05-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6685186U JPH0311648Y2 (zh) | 1986-05-01 | 1986-05-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62179541U JPS62179541U (zh) | 1987-11-14 |
JPH0311648Y2 true JPH0311648Y2 (zh) | 1991-03-20 |
Family
ID=30905225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6685186U Expired JPH0311648Y2 (zh) | 1986-05-01 | 1986-05-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0311648Y2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007186853A (ja) * | 2006-01-11 | 2007-07-26 | Taisei Corp | 導電性床の施工方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3980763B2 (ja) * | 1997-07-14 | 2007-09-26 | 徹 日野 | パネル組立式クリーンルーム |
JP2002228220A (ja) * | 2001-01-26 | 2002-08-14 | Ishikawajima Harima Heavy Ind Co Ltd | クリーンルーム |
JP5222572B2 (ja) * | 2008-01-28 | 2013-06-26 | 内外施設工業株式会社 | 作業室 |
CN102296841A (zh) * | 2011-06-10 | 2011-12-28 | 珠海市乐通化工股份有限公司 | 除静电的化工厂房 |
-
1986
- 1986-05-01 JP JP6685186U patent/JPH0311648Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007186853A (ja) * | 2006-01-11 | 2007-07-26 | Taisei Corp | 導電性床の施工方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS62179541U (zh) | 1987-11-14 |
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