JPH0311054B2 - - Google Patents

Info

Publication number
JPH0311054B2
JPH0311054B2 JP55173415A JP17341580A JPH0311054B2 JP H0311054 B2 JPH0311054 B2 JP H0311054B2 JP 55173415 A JP55173415 A JP 55173415A JP 17341580 A JP17341580 A JP 17341580A JP H0311054 B2 JPH0311054 B2 JP H0311054B2
Authority
JP
Japan
Prior art keywords
cathode
tip
single crystal
natural surface
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55173415A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5796437A (en
Inventor
Masaji Ishii
Hirotoshi Hagiwara
Hideo Hiraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP17341580A priority Critical patent/JPS5796437A/ja
Priority to US06/327,467 priority patent/US4482838A/en
Publication of JPS5796437A publication Critical patent/JPS5796437A/ja
Publication of JPH0311054B2 publication Critical patent/JPH0311054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/148—Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material

Landscapes

  • Solid Thermionic Cathode (AREA)
  • Electron Sources, Ion Sources (AREA)
JP17341580A 1980-12-09 1980-12-09 Thermion emission cathode Granted JPS5796437A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17341580A JPS5796437A (en) 1980-12-09 1980-12-09 Thermion emission cathode
US06/327,467 US4482838A (en) 1980-12-09 1981-12-04 Thermionic emission cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17341580A JPS5796437A (en) 1980-12-09 1980-12-09 Thermion emission cathode

Publications (2)

Publication Number Publication Date
JPS5796437A JPS5796437A (en) 1982-06-15
JPH0311054B2 true JPH0311054B2 (OSRAM) 1991-02-15

Family

ID=15960008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17341580A Granted JPS5796437A (en) 1980-12-09 1980-12-09 Thermion emission cathode

Country Status (2)

Country Link
US (1) US4482838A (OSRAM)
JP (1) JPS5796437A (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186126A (ja) * 1982-04-23 1983-10-31 Denki Kagaku Kogyo Kk 熱電子放射陰極チツプ
EP0526663A4 (en) * 1991-02-27 1993-09-22 Seiko Epson Corporation Light projecting device
EP0675519A1 (en) * 1994-03-30 1995-10-04 AT&T Corp. Apparatus comprising field emitters
US5990619A (en) * 1996-03-28 1999-11-23 Tektronix, Inc. Electrode structures for plasma addressed liquid crystal display devices
JP2001325910A (ja) * 2000-05-16 2001-11-22 Denki Kagaku Kogyo Kk 電子銃とその使用方法
EP1858047B1 (en) * 2005-01-14 2012-06-27 Denki Kagaku Kogyo Kabushiki Kaisha Electron source manufacturing method
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus
WO2014007121A1 (ja) 2012-07-03 2014-01-09 独立行政法人物質・材料研究機構 六ホウ化金属冷電界エミッター、その製造方法及び電子銃
JP6938498B2 (ja) * 2016-07-19 2021-09-22 デンカ株式会社 電子源およびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5231651A (en) * 1975-09-04 1977-03-10 Natl Inst For Res In Inorg Mater Scan-type electron microscope
JPS6030054B2 (ja) * 1976-03-15 1985-07-13 株式会社日立製作所 熱陰極
JPS5812695B2 (ja) * 1977-09-30 1983-03-09 電気化学工業株式会社 熱電子放射陰極の製造法
JPS5588233A (en) * 1978-12-26 1980-07-03 Denki Kagaku Kogyo Kk Hexaboride single crystal cathode
JPS55131945A (en) * 1979-03-31 1980-10-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron gun

Also Published As

Publication number Publication date
JPS5796437A (en) 1982-06-15
US4482838A (en) 1984-11-13

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