JPH0298631U - - Google Patents
Info
- Publication number
- JPH0298631U JPH0298631U JP703589U JP703589U JPH0298631U JP H0298631 U JPH0298631 U JP H0298631U JP 703589 U JP703589 U JP 703589U JP 703589 U JP703589 U JP 703589U JP H0298631 U JPH0298631 U JP H0298631U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- replenisher
- replenisher supply
- liquid
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims 4
- 238000009835 boiling Methods 0.000 claims 2
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007035U JPH0741152Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板表面処理装置の液補充装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007035U JPH0741152Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板表面処理装置の液補充装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0298631U true JPH0298631U ( ) | 1990-08-06 |
| JPH0741152Y2 JPH0741152Y2 (ja) | 1995-09-20 |
Family
ID=31211709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007035U Expired - Lifetime JPH0741152Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板表面処理装置の液補充装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0741152Y2 ( ) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5452985A (en) * | 1977-10-04 | 1979-04-25 | Kyushu Nippon Electric | Etching device |
| JPS5984839U (ja) * | 1982-11-30 | 1984-06-08 | 日本電気ホームエレクトロニクス株式会社 | 半導体製造装置 |
| JPS62213257A (ja) * | 1986-03-14 | 1987-09-19 | Mitsubishi Electric Corp | 湿式処理槽 |
-
1989
- 1989-01-26 JP JP1989007035U patent/JPH0741152Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5452985A (en) * | 1977-10-04 | 1979-04-25 | Kyushu Nippon Electric | Etching device |
| JPS5984839U (ja) * | 1982-11-30 | 1984-06-08 | 日本電気ホームエレクトロニクス株式会社 | 半導体製造装置 |
| JPS62213257A (ja) * | 1986-03-14 | 1987-09-19 | Mitsubishi Electric Corp | 湿式処理槽 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0741152Y2 (ja) | 1995-09-20 |
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