JPH01140825U - - Google Patents
Info
- Publication number
- JPH01140825U JPH01140825U JP3852488U JP3852488U JPH01140825U JP H01140825 U JPH01140825 U JP H01140825U JP 3852488 U JP3852488 U JP 3852488U JP 3852488 U JP3852488 U JP 3852488U JP H01140825 U JPH01140825 U JP H01140825U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning liquid
- processing section
- substrate
- hot water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 238000010992 reflux Methods 0.000 claims 2
- 239000008367 deionised water Substances 0.000 claims 1
- 229910021641 deionized water Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3852488U JPH01140825U ( ) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3852488U JPH01140825U ( ) | 1988-03-23 | 1988-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01140825U true JPH01140825U ( ) | 1989-09-27 |
Family
ID=31265068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3852488U Pending JPH01140825U ( ) | 1988-03-23 | 1988-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01140825U ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000033367A1 (fr) * | 1998-12-01 | 2000-06-08 | Organo Corporation | Dispositif de lavage |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61224327A (ja) * | 1985-03-29 | 1986-10-06 | Hitachi Ltd | 洗浄装置 |
JPS6223405A (ja) * | 1985-07-24 | 1987-01-31 | Hitachi Ltd | 過酸化水素残存量確認方法及びその装置 |
JPS6310529A (ja) * | 1986-07-01 | 1988-01-18 | Mitsubishi Electric Corp | 洗浄装置 |
-
1988
- 1988-03-23 JP JP3852488U patent/JPH01140825U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61224327A (ja) * | 1985-03-29 | 1986-10-06 | Hitachi Ltd | 洗浄装置 |
JPS6223405A (ja) * | 1985-07-24 | 1987-01-31 | Hitachi Ltd | 過酸化水素残存量確認方法及びその装置 |
JPS6310529A (ja) * | 1986-07-01 | 1988-01-18 | Mitsubishi Electric Corp | 洗浄装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000033367A1 (fr) * | 1998-12-01 | 2000-06-08 | Organo Corporation | Dispositif de lavage |
US6494223B1 (en) | 1998-12-01 | 2002-12-17 | Tadahiro Ohmi | Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas |
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