JPH01140825U - - Google Patents

Info

Publication number
JPH01140825U
JPH01140825U JP3852488U JP3852488U JPH01140825U JP H01140825 U JPH01140825 U JP H01140825U JP 3852488 U JP3852488 U JP 3852488U JP 3852488 U JP3852488 U JP 3852488U JP H01140825 U JPH01140825 U JP H01140825U
Authority
JP
Japan
Prior art keywords
cleaning
cleaning liquid
processing section
substrate
hot water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3852488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3852488U priority Critical patent/JPH01140825U/ja
Publication of JPH01140825U publication Critical patent/JPH01140825U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP3852488U 1988-03-23 1988-03-23 Pending JPH01140825U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3852488U JPH01140825U ( ) 1988-03-23 1988-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3852488U JPH01140825U ( ) 1988-03-23 1988-03-23

Publications (1)

Publication Number Publication Date
JPH01140825U true JPH01140825U ( ) 1989-09-27

Family

ID=31265068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3852488U Pending JPH01140825U ( ) 1988-03-23 1988-03-23

Country Status (1)

Country Link
JP (1) JPH01140825U ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000033367A1 (fr) * 1998-12-01 2000-06-08 Organo Corporation Dispositif de lavage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224327A (ja) * 1985-03-29 1986-10-06 Hitachi Ltd 洗浄装置
JPS6223405A (ja) * 1985-07-24 1987-01-31 Hitachi Ltd 過酸化水素残存量確認方法及びその装置
JPS6310529A (ja) * 1986-07-01 1988-01-18 Mitsubishi Electric Corp 洗浄装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224327A (ja) * 1985-03-29 1986-10-06 Hitachi Ltd 洗浄装置
JPS6223405A (ja) * 1985-07-24 1987-01-31 Hitachi Ltd 過酸化水素残存量確認方法及びその装置
JPS6310529A (ja) * 1986-07-01 1988-01-18 Mitsubishi Electric Corp 洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000033367A1 (fr) * 1998-12-01 2000-06-08 Organo Corporation Dispositif de lavage
US6494223B1 (en) 1998-12-01 2002-12-17 Tadahiro Ohmi Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas

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