JPH029322Y2 - - Google Patents
Info
- Publication number
- JPH029322Y2 JPH029322Y2 JP16053884U JP16053884U JPH029322Y2 JP H029322 Y2 JPH029322 Y2 JP H029322Y2 JP 16053884 U JP16053884 U JP 16053884U JP 16053884 U JP16053884 U JP 16053884U JP H029322 Y2 JPH029322 Y2 JP H029322Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- guide
- case
- secondary filter
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011358 absorbing material Substances 0.000 claims description 5
- 238000004887 air purification Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16053884U JPH029322Y2 (US07223432-20070529-C00017.png) | 1984-10-23 | 1984-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16053884U JPH029322Y2 (US07223432-20070529-C00017.png) | 1984-10-23 | 1984-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6176235U JPS6176235U (US07223432-20070529-C00017.png) | 1986-05-22 |
| JPH029322Y2 true JPH029322Y2 (US07223432-20070529-C00017.png) | 1990-03-07 |
Family
ID=30718462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16053884U Expired JPH029322Y2 (US07223432-20070529-C00017.png) | 1984-10-23 | 1984-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029322Y2 (US07223432-20070529-C00017.png) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2585307B2 (ja) * | 1987-10-23 | 1997-02-26 | 株式会社日立製作所 | 空気清浄装置 |
| JPH0775650B2 (ja) * | 1990-05-22 | 1995-08-16 | ニッタ株式会社 | 空気清浄装置 |
| JP2008086873A (ja) * | 2006-09-29 | 2008-04-17 | Japan Servo Co Ltd | ファンフィルタユニット |
| JP4612067B2 (ja) * | 2008-02-19 | 2011-01-12 | 新菱冷熱工業株式会社 | 空調吹出装置 |
| JP5214584B2 (ja) * | 2009-12-21 | 2013-06-19 | 興研株式会社 | 一様流吹き出しプッシュフード |
-
1984
- 1984-10-23 JP JP16053884U patent/JPH029322Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6176235U (US07223432-20070529-C00017.png) | 1986-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4427427A (en) | Vertical laminar flow filter module | |
| KR950704657A (ko) | 청정실 천정에서 소용돌이를 감소시키기 위한 방법 및 장치(Method and device for reducing vortices at a cleanroom celling) | |
| JP3746120B2 (ja) | クリーンルーム用空気吹出装置 | |
| JPH029322Y2 (US07223432-20070529-C00017.png) | ||
| JP2002506194A (ja) | 成形したポリマーの空気拡散スクリーン | |
| KR200427321Y1 (ko) | 개인대응형 테이블 고정 베큠 장치 | |
| JPH06323616A (ja) | クリーンルームの給気吹出ユニット | |
| CN2367806Y (zh) | 低噪音风机－滤网机组 | |
| JP2001116310A (ja) | ファンフィルターユニット | |
| JP3614653B2 (ja) | エアクリーナの水抜き構造 | |
| JPS6226785B2 (US07223432-20070529-C00017.png) | ||
| JPH0315104B2 (US07223432-20070529-C00017.png) | ||
| JPH0728511Y2 (ja) | 可搬式クリーンブースにおける曲面多孔板吹出構造 | |
| JPH0427409A (ja) | 空気清浄装置 | |
| JPS61168735A (ja) | クリ−ンル−ム | |
| JPH0223776B2 (US07223432-20070529-C00017.png) | ||
| JP2590917Y2 (ja) | 天井システム用フィルタユニット | |
| JPS59185923A (ja) | クリーンルームの形成方法 | |
| JPS62258722A (ja) | 空気清浄装置 | |
| JPH0515934B2 (US07223432-20070529-C00017.png) | ||
| JP2001153414A (ja) | 循環型クリーンルーム | |
| JPS61168736A (ja) | クリ−ンル−ム | |
| JP3420722B2 (ja) | 局所空気清浄装置 | |
| JPS61291849A (ja) | クリ−ンル−ム | |
| JPH085140A (ja) | 清浄空気吹出装置 |
