JPH02908Y2 - - Google Patents

Info

Publication number
JPH02908Y2
JPH02908Y2 JP1981160291U JP16029181U JPH02908Y2 JP H02908 Y2 JPH02908 Y2 JP H02908Y2 JP 1981160291 U JP1981160291 U JP 1981160291U JP 16029181 U JP16029181 U JP 16029181U JP H02908 Y2 JPH02908 Y2 JP H02908Y2
Authority
JP
Japan
Prior art keywords
rotation
work holder
rotation shaft
work
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981160291U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5866637U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16029181U priority Critical patent/JPS5866637U/ja
Publication of JPS5866637U publication Critical patent/JPS5866637U/ja
Application granted granted Critical
Publication of JPH02908Y2 publication Critical patent/JPH02908Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16029181U 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置 Granted JPS5866637U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16029181U JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16029181U JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Publications (2)

Publication Number Publication Date
JPS5866637U JPS5866637U (ja) 1983-05-06
JPH02908Y2 true JPH02908Y2 (enrdf_load_html_response) 1990-01-10

Family

ID=29952705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16029181U Granted JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Country Status (1)

Country Link
JP (1) JPS5866637U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232434A (ja) * 1983-06-16 1984-12-27 Nippon Telegr & Teleph Corp <Ntt> 真空処理装置に於けるワ−ク回転装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598Y2 (enrdf_load_html_response) * 1978-09-14 1981-01-09
JPS592743B2 (ja) * 1980-10-17 1984-01-20 富士通株式会社 蒸着装置

Also Published As

Publication number Publication date
JPS5866637U (ja) 1983-05-06

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